首页   按字顺浏览 期刊浏览 卷期浏览 Laser applications for micromachining
Laser applications for micromachining

 

作者: Masayoshi Esashi,   Kazuyuki Minami,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1996）
卷期: Volume 369, issue 1  

页码: 1268-1273

 

ISSN:0094-243X

 

年代: 1996

 

DOI:10.1063/1.50416

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Laser assisted silicon etching was developed for packaged microsensors. Laser assisted Cr CVD was applied for selective metallization on nonplaner surfaces. High rate laser CVD using low temperature condensation method was developed for micro assembly and projection patterning. ©1996 American Institute of Physics.

 

点击下载:  PDF (398KB)



返 回