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Dual tunneling-unit scanning tunneling microscope for length measurement based on crystalline lattice

 

作者: Haijun Zhang,   Toshiro Higuchi,   Nobuhisa Nishioki,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1997)
卷期: Volume 15, issue 1  

页码: 174-177

 

ISSN:1071-1023

 

年代: 1997

 

DOI:10.1116/1.589245

 

出版商: American Vacuum Society

 

关键词: ELECTRON MICROSCOPES;DESIGN;PYROLYTIC CARBON;CRYSTAL STRUCTURE;IMAGES;CRYSTAL LATTICES;TUNNEL EFFECT;graphite

 

数据来源: AIP

 

摘要:

A dual tunneling-unit scanning tunneling microscope (DTU STM) was developed for nm order length measurement with wide scan range. The crystalline lattice of highly oriented pyrolitic graphite (HOPG) was used as reference scale. A reference unit was set up on top of a test unit. The reference sample holder and the probe tip of test unit were attached to one singleXYscanner on either surface, while the test sample holder was open. This enables simultaneous acquisition of wide images of HOPG and test sample. The length in test sample image was measured by counting the number of HOPG lattices. An inchworm actuator and an impact drive mechanism were introduced to roughly position probe tips. TheXYscanner was designed to be elastic to eliminate image distortion. Some comparison experiments using two HOPG chips were carried out in air. The DTU STM is confirmed to be a stable and more powerful device for length measurement which has nanometer accuracy when covering a wide scan range up to several micrometers, and is capable of measuring comparatively large and heavy samples.

 

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