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Electron trajectories and light emitting images of starlike thin‐film field emitters

 

作者: Akira Kaneko,   Isao Sumita,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 2  

页码: 606-611

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.589144

 

出版商: American Vacuum Society

 

关键词: THIN FILMS;MOLYBDENUM;TUNGSTEN;FIELD EMISSION;TRAJECTORIES;COMPUTERIZED SIMULATION;Mo;W

 

数据来源: AIP

 

摘要:

Electron trajectories and light emitting images for the electron emission from a single starlike thin‐film field emitter and a 200‐μm‐sq field emitter array have been studied. In the early stage of electron emission from the starlike field emitters, a unique light emitting image appeared on a phosphor screen. The image consisted of an upper hornlike and a lower mountainlike pattern, their geometrical configuration roughly agreeing with the simulation results of electron trajectories using a finite integral equation method code. From the observation of the light emitting images for the starlike field emitters, we found that the images of the starlike field emitters resulted from overlapping electron beams emitted from the four apices of each field emitter. The emitted electrons had an electron emitting angle of 40° and a horizontal electron spread angle of 30°–40° at an anode voltage of 340 V. An increase in the anode voltage to 680 V reduced the vertical electron emitting angle to 30°.

 

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