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Optical reflectance measurements of transients during molecular‐beam epitaxial growth on (001) GaAs

 

作者: J. P. Harbison,   D. E. Aspnes,   A. A. Studna,   L. T. Florez,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1988)
卷期: Volume 6, issue 2  

页码: 740-742

 

ISSN:0734-211X

 

年代: 1988

 

DOI:10.1116/1.584362

 

出版商: American Vacuum Society

 

关键词: FILM GROWTH;THIN FILMS;OPTICAL REFLECTION;GALLIUM ARSENIDES;CRYSTAL STRUCTURE;SURFACE STRUCTURE;SURFACE REACTIONS;MOLECULAR BEAM EPITAXY;RHEED;ALUMINIUM;GALLIUM;POLARIZATION;GaAs

 

数据来源: AIP

 

摘要:

We report measurements of the reflectance difference (RD) of light polarized along the [110] and [1̄10]directions of a growing (001) GaAs crystal in a molecular‐beam epitaxy (MBE) chamber. Observations of RD transients occurring due to changes in surface stabilization resulting from interruption of the As beam are compared with simultaneous observations of reflection high‐energy electron diffraction intensities and are shown to give both chemical and structural information about the growing surface. Spectral dependencies of the RD data show distinct responses for Ga and Al surface coverages, suggesting optimal wavelengths and polarizations for selective modification of surface dimer bonding during growth.

 

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