Optical reflectance measurements of transients during molecular‐beam epitaxial growth on (001) GaAs
作者:
J. P. Harbison,
D. E. Aspnes,
A. A. Studna,
L. T. Florez,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 2
页码: 740-742
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.584362
出版商: American Vacuum Society
关键词: FILM GROWTH;THIN FILMS;OPTICAL REFLECTION;GALLIUM ARSENIDES;CRYSTAL STRUCTURE;SURFACE STRUCTURE;SURFACE REACTIONS;MOLECULAR BEAM EPITAXY;RHEED;ALUMINIUM;GALLIUM;POLARIZATION;GaAs
数据来源: AIP
摘要:
We report measurements of the reflectance difference (RD) of light polarized along the [110] and [1̄10]directions of a growing (001) GaAs crystal in a molecular‐beam epitaxy (MBE) chamber. Observations of RD transients occurring due to changes in surface stabilization resulting from interruption of the As beam are compared with simultaneous observations of reflection high‐energy electron diffraction intensities and are shown to give both chemical and structural information about the growing surface. Spectral dependencies of the RD data show distinct responses for Ga and Al surface coverages, suggesting optimal wavelengths and polarizations for selective modification of surface dimer bonding during growth.
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