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Reliable Submicron Pressure Readings with Capacitance Manometer

 

作者: Nyle G. Utterback,   Thomas Griffith,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1966)
卷期: Volume 37, issue 7  

页码: 866-870

 

ISSN:0034-6748

 

年代: 1966

 

DOI:10.1063/1.1720349

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A cold trapped McLeod gauge, a capacitance manometer, and an ion gauge have been used simultaneously to measure gas pressure in the range 10−4to 3×10−3Torr. Data were obtained for He, Ne, Ar, Kr, Xe, N2, O2, CH4, CO, H2, and CO2. The capacitance manometer and pressure chamber were maintained at a constant room temperature to avoid thermal transpiration corrections. Comparison of data among gases clearly showed the systematic McLeod gauge error attributed to mercury streaming to the cold trap. The capacitance manometer and McLeod gauge readings agreed within 2% at 10−3Torr for He, while the McLeod reading was 15% low for Xe at the same pressure. The errors for the other gases were intermediate. Spurious mercury capillary wetting effects, leading to serious errors in the McLeod gauge reading, were also noted for some of the molecular gases. The capacitance manometer was clearly superior to the McLeod gauge as a universal pressure sensor, and appears capable of reliable readings accurate to a few per cent at 10−4Torr.

 

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