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Noncontact semiconductor wafer characterization with the terahertz Hall effect

 

作者: D. M. Mittleman,   J. Cunningham,   M. C. Nuss,   M. Geva,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 1  

页码: 16-18

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119456

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We demonstrate noncontact measurements of the Hall mobility of doped semiconductor wafers with roughly 250 &mgr;m spatial resolution, using polarization rotation of focused beams of terahertz (THz) radiation in the presence of a static magnetic field. Quantitative and independent images of both carrier density and mobility of a doped semiconductor wafer have been obtained. ©1997 American Institute of Physics.

 

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