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Temporal evolution of the electron distribution function in an electron cyclotron resonant discharge

 

作者: M. R. Brown,   T. E. Sheridan,   M. A. Hayes,  

 

期刊: Journal of Applied Physics  (AIP Available online 1991)
卷期: Volume 70, issue 10  

页码: 5306-5313

 

ISSN:0021-8979

 

年代: 1991

 

DOI:10.1063/1.350240

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We present time‐resolved experimental measurements of the electron distribution functionf(v∥,v⊥,t) in a pulsed, partially ionized, electron cyclotron resonance (ECR)‐produced plasma. The discharge has some characteristics similar to those used in plasma processing applications. These properties include ECR production in a strong magnetic field and low electron temperature (Te<5 eV). In addition, electron‐neutral collisions play an important role. A novel analyzer is used to study the dependence off(v∥,v⊥,t) on velocities both parallel and perpendicular to the magnetic field. This information cannot be obtained with a simple Langmuir probe. The temporal evolution off(v∥,v⊥,t) is examined during plasma formation, with the source biased, with the source grounded and in the afterglow.

 

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