Temporal evolution of the electron distribution function in an electron cyclotron resonant discharge
作者:
M. R. Brown,
T. E. Sheridan,
M. A. Hayes,
期刊:
Journal of Applied Physics
(AIP Available online 1991)
卷期:
Volume 70,
issue 10
页码: 5306-5313
ISSN:0021-8979
年代: 1991
DOI:10.1063/1.350240
出版商: AIP
数据来源: AIP
摘要:
We present time‐resolved experimental measurements of the electron distribution functionf(v∥,v⊥,t) in a pulsed, partially ionized, electron cyclotron resonance (ECR)‐produced plasma. The discharge has some characteristics similar to those used in plasma processing applications. These properties include ECR production in a strong magnetic field and low electron temperature (Te<5 eV). In addition, electron‐neutral collisions play an important role. A novel analyzer is used to study the dependence off(v∥,v⊥,t) on velocities both parallel and perpendicular to the magnetic field. This information cannot be obtained with a simple Langmuir probe. The temporal evolution off(v∥,v⊥,t) is examined during plasma formation, with the source biased, with the source grounded and in the afterglow.
点击下载:
PDF
(1047KB)
返 回