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Characterization of lateral thin-film-edge field emitter arrays

 

作者: B. R. Johnson,   A. I. Akinwande,   D. Murphy,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1997)
卷期: Volume 15, issue 2  

页码: 535-538

 

ISSN:1071-1023

 

年代: 1997

 

DOI:10.1116/1.589288

 

出版商: American Vacuum Society

 

关键词: (Ti,W);Mo;W;Pt

 

数据来源: AIP

 

摘要:

Measurements on arrays of lateral thin-film-edge field emitters are described, including current–voltage characteristics and results obtained with a high voltage (10 kV) cathodoluminescent phosphor screen. These devices offer the potential for enhanced emitter lifetime compared to conventional microtips, because one of the gate electrodes protects the emitter edge from ion sputter damage. One goal of this work is to demonstrate the feasibility of a cathodoluminescent field emitter lamp for a high-brightness backlight in an avionics display.

 

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