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Behavior of oxygen in the crystal formation and heat treatment of silicon heavily doped with antimony

 

作者: Tadashi Nozaki,   Yoshiko Itoh,   Tsumoru Masui,   Takao Abe,  

 

期刊: Journal of Applied Physics  (AIP Available online 1986)
卷期: Volume 59, issue 7  

页码: 2562-2565

 

ISSN:0021-8979

 

年代: 1986

 

DOI:10.1063/1.337005

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Using charged particle activation analysis, oxygen concentration in silicon crystals heavily doped with antimony has been shown to be considerably lower than in undoped crystals grown under otherwise the same conditions. The difficulty of oxygen precipitation in these doped crystals is therefore due to the lowered oxygen concentration and also to the difference in the dopant effect on precipitate formation.

 

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