Hydrides on the6H-SiC(0001¯)and (0001) surfaces before and after hydrogen annealing were investigated by infrared attenuated total reflection spectroscopy. The absorption bands ofCH2andCH3were observed from the6H-SiC(0001¯)and (0001) surfaces before hydrogen annealing. After hydrogen annealing, a sharp C–H stretching vibration attributable to a monohydride appeared on the6H-SiC(0001¯)surface, in contrast to a sharp Si–H stretching vibration which can be observed on the6H-SiC(0001)surface. ©1997 American Institute of Physics.