Highly Ionized Hollow Cathode Discharge
作者:
L. M. Lidsky,
S. D. Rothleder,
D. J. Rose,
S. Yoshikawa,
C. Michelson,
R. J. Mackin,
期刊:
Journal of Applied Physics
(AIP Available online 1962)
卷期:
Volume 33,
issue 8
页码: 2490-2497
ISSN:0021-8979
年代: 1962
DOI:10.1063/1.1729002
出版商: AIP
数据来源: AIP
摘要:
A hollow cathode discharge (HCD) is described that produces a highly ionized steady‐state plasma (ne≈1013−1014/cm3) at a temperature 1–10 eV, in a volume as large as 104cm3, with background neutral gas density ≈1013/cm3. The HCD is generated by the prescription: gas flow (H2, He, A, or N2) 0.05–2 cc STP/sec through a refractory metal hollow cathode tube into a vacuum; any anode; 20–200 V dc applied. An axial induction 100–1000 G is used to collimate the discharge and to aid in starting by rf excitation. The HCD runs from the cathode interior, deep enough thatp0d≈1 cm×mm Hg. Current range is 2.0–300 A. Various electrode configurations and a wide range of operating parameters have been studied. The external plasma density and temperature were measured by Langmuir probes. A discussion is given of the confinement mechanism and of the energy balance, both in the external plasma and in the region of the cathode itself.
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