Synthesis of electrostatic deflectors with given source parameters, first‐order properties, and minimum aberrations can be realized by using the cubic spline method or theapriorigiven multielectrode approach. Synthesis of electrostatic deflectors was successfully achieved previously by using the cubic spline method. In this paper we present synthesis of electrostatic deflectors based on theapriorigiven multielectrode approach for the purpose of obtaining the minimum beam spot size through a sequential optimization technique. Our calculations show that the third‐order geometrical deflection aberrations can be reduced by about two to three orders of magnitude using a multielectrode deflector with three units or five units, each having short cylindrical segments with geometrically octupole symmetry.