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Hydrogen neutralization of chalcogen double donors in silicon

 

作者: G. Pensl,   G. Roos,   C. Holm,   E. Sirtl,   N. M. Johnson,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 51, issue 6  

页码: 451-453

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.98419

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Hydrogen neutralization of chalcogen (S, Se, and Te) double‐donor centers in single‐crystal silicon is demonstrated with deep level transient spectroscopy. The deep‐donor chalcogen concentration can be reduced by greater than a factor of 100, while in the same samples the phosphorus shallow‐donor concentration decreases by only a small percentage. Both electronic levels of the double donors were fully removed by hydrogenation and recovered with an anneal at 500 °C.

 

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