Hydrogen neutralization of chalcogen double donors in silicon
作者:
G. Pensl,
G. Roos,
C. Holm,
E. Sirtl,
N. M. Johnson,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 51,
issue 6
页码: 451-453
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98419
出版商: AIP
数据来源: AIP
摘要:
Hydrogen neutralization of chalcogen (S, Se, and Te) double‐donor centers in single‐crystal silicon is demonstrated with deep level transient spectroscopy. The deep‐donor chalcogen concentration can be reduced by greater than a factor of 100, while in the same samples the phosphorus shallow‐donor concentration decreases by only a small percentage. Both electronic levels of the double donors were fully removed by hydrogenation and recovered with an anneal at 500 °C.
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