Electron beam deposition studies of the rare gases
作者:
A. Mandl,
E. Salesky,
期刊:
Journal of Applied Physics
(AIP Available online 1986)
卷期:
Volume 60,
issue 5
页码: 1565-1568
ISSN:0021-8979
年代: 1986
DOI:10.1063/1.337292
出版商: AIP
数据来源: AIP
摘要:
The spatial distribution and absolute values of the stopping power of the rare gases Kr, Ar, and Ne were determined in 250‐kV electron beam excited gas mixtures. The measured values were compared with 1D and 3D Monte Carlo code calculations. Excellent agreement was found in all cases.
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