Thin lead zirconate-titanate films deposited by tripole magnetron sputtering
作者:
Akira Fujisawa,
Masahiro Furihata,
Isamu Minemura,
Tatsuo Fukami,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1994)
卷期:
Volume 4,
issue 1
页码: 53-59
ISSN:1058-4587
年代: 1994
DOI:10.1080/10584589408018660
出版商: Taylor & Francis Group
关键词: PZT thin films;magnetron sputtering;perovskite;ZrO2crystallinity;orientation
数据来源: Taylor
摘要:
Thin lead zirconate-titanate (PZT) films withc-axis orientation have been grown on MgO(100) using the tripole magnetron sputtering system. This system makes it possible to sputter lead and zirconium-titanium alternately from one composite metal target. Lead concentration in the deposited films, estimated by X-ray microanalyzer, has a great influence on the crystal growth. At relatively short period of the lead sputtering cycle, the concentration increases proportionally with the transported amount to the substrate. At longer period it becomes saturated with perovskite structure due to a self-limiting process. Although a small amount of the lead deficiency affects the crystallinity and the orientation of the film, a further deficiency of lead results in the precipitation of a ZrO2phase.
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