Growth of ultrapure InP by atmospheric pressure organometallic vapor phase epitaxy
作者:
C. H. Chen,
M. Kitamura,
R. M. Cohen,
G. B. Stringfellow,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 49,
issue 15
页码: 963-965
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.97496
出版商: AIP
数据来源: AIP
摘要:
We report the growth and characterization of ultrapure InP using trimethylindium and phosphine by atmospheric pressure organometallic vapor phase epitaxy (APOMVPE). The 77 K mobility of 131 000 cm2 /V s is the highest ever obtained by APOMVPE and among the highest ever measured for InP using any growth technique. The low‐temperature photoluminescence measurements reveal that impurity reduction occurs at higher growth temperatures.
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