首页   按字顺浏览 期刊浏览 卷期浏览 Growth of ultrapure InP by atmospheric pressure organometallic vapor phase epitaxy
Growth of ultrapure InP by atmospheric pressure organometallic vapor phase epitaxy

 

作者: C. H. Chen,   M. Kitamura,   R. M. Cohen,   G. B. Stringfellow,  

 

期刊: Applied Physics Letters  (AIP Available online 1986)
卷期: Volume 49, issue 15  

页码: 963-965

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.97496

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report the growth and characterization of ultrapure InP using trimethylindium and phosphine by atmospheric pressure organometallic vapor phase epitaxy (APOMVPE). The 77 K mobility of 131 000 cm2 /V s is the highest ever obtained by APOMVPE and among the highest ever measured for InP using any growth technique. The low‐temperature photoluminescence measurements reveal that impurity reduction occurs at higher growth temperatures.

 

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