Liquid‐jet target for laser‐plasma soft x‐ray generation
作者:
L. Malmqvist,
L. Rymell,
M. Berglund,
H. M. Hertz,
期刊:
Review of Scientific Instruments
(AIP Available online 1996)
卷期:
Volume 67,
issue 12
页码: 4150-4153
ISSN:0034-6748
年代: 1996
DOI:10.1063/1.1147561
出版商: AIP
数据来源: AIP
摘要:
We describe a new liquid‐target system for low‐debris laser‐plasma soft x‐ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7–1 keV proximity lithography and water‐window x‐ray microscopy applications. Compared to an existing liquid‐droplet target, this target system has the same low debris emission, high x‐ray photon flux, and narrow spectral bandwidth. The advantages of the liquid‐jet target include improved x‐ray flux stability, increased range of suitable target liquids, and elimination of the need for temporal synchronization, thereby allowing less complex laser systems to be used. ©1996 American Institute of Physics.
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