Ferroelectric properties of lead‐zirconate‐titanate films prepared by laser ablation
作者:
Hideo Kidoh,
Toshio Ogawa,
Akiharu Morimoto,
Tatsuo Shimizu,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 25
页码: 2910-2912
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.104719
出版商: AIP
数据来源: AIP
摘要:
Ferroelectric lead‐zirconate‐titanate (PZT) thin films have been deposited by excimer laser ablation on sapphire substrates with and without an electrode. In preparation for the films, O2gas pressure has greatly influenced the film structure and morphology. For the first time, we have confirmed the ferroelectric properties of PZT films prepared by laser ablation without post‐annealing. It appears to be possible to use these films for nonvolatile random access memories with some additional improvements in the film properties.
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