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Ferroelectric properties of lead‐zirconate‐titanate films prepared by laser ablation

 

作者: Hideo Kidoh,   Toshio Ogawa,   Akiharu Morimoto,   Tatsuo Shimizu,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 58, issue 25  

页码: 2910-2912

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.104719

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Ferroelectric lead‐zirconate‐titanate (PZT) thin films have been deposited by excimer laser ablation on sapphire substrates with and without an electrode. In preparation for the films, O2gas pressure has greatly influenced the film structure and morphology. For the first time, we have confirmed the ferroelectric properties of PZT films prepared by laser ablation without post‐annealing. It appears to be possible to use these films for nonvolatile random access memories with some additional improvements in the film properties.

 

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