Resistance and mobility changes in InGaAs produced by light ion bombardment
作者:
B. Tell,
K. F. Brown‐Goebeler,
T. J. Bridges,
E. G. Burkhardt,
期刊:
Journal of Applied Physics
(AIP Available online 1986)
卷期:
Volume 60,
issue 2
页码: 665-667
ISSN:0021-8979
年代: 1986
DOI:10.1063/1.337410
出版商: AIP
数据来源: AIP
摘要:
We have measured sheet resistance and mobility changes for a series of In0.53Ga0.47As layers as a result of hydrogen, boron, and beryllium implantation. We find that boron and beryllium implantation can produce a two order‐of‐magnitude increase in sheet resistance due mainly to a decrease in mobility accompanied by a smaller decrease in the sheet carrier concentration. Hydrogen implantation results in a decrease in sheet resistance due to an increase in electron concentration accompanied by only a small mobility decrease. The increase in sheet resistance due to boron and beryllium implants is not large enough to have obvious application for device isolation.
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