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The optogalvanic effect in a 13.56‐MHz chlorine discharge

 

作者: Jerry Kramer,  

 

期刊: Journal of Applied Physics  (AIP Available online 1986)
卷期: Volume 60, issue 9  

页码: 3072-3080

 

ISSN:0021-8979

 

年代: 1986

 

DOI:10.1063/1.337763

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Irradiation of the bulk plasma region in a 13.56‐MHz Cl2discharge with an XeCl laser increased the current through the discharge. The perturbed current waveform had the shape of an amplitude modulated waveform with a period long with respect to the rf cycle. This optogalvanic effect has been attributed to the photodetachment of electrons from Cl−, which perturbs the electron density. The optogalvanic signal depended on the square root of the pressure and was almost independent of the discharge current. The optogalvanic current has been correlated with the dependence of the Cl−density on pressure and discharge current as well as the changes in the electric field induced by the perturbation. Saturation of the signal at high laser intensity has been accounted for by the impedance mismatch induced by the increased electron density. From the relationship between the saturation and the impedance mismatch, the ratio of Cl−to the electron density was calculated. Probing various parts of the discharge with a laser beam having a smaller cross section than the discharge did not reveal any significant spatial variations in the discharge.

 

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