Optical emission from neon/oxygen rf sputtering glow discharges
作者:
C. R. Aita,
M. E. Marhic,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1983)
卷期:
Volume 1,
issue 1
页码: 69-73
ISSN:0734-2101
年代: 1983
DOI:10.1116/1.572312
出版商: American Vacuum Society
关键词: glow discharges;neon;oxygen;oxygen ions;emission spectra;line intensity;visible spectra;metastable states;sputtering;excitation;penning effect;quenching;p states;s states
数据来源: AIP
摘要:
The results of an optical emission study of neon and oxygen species which exist in Ne/O2rf diode sputtering glow discharges are presented. Comparing emission intensities in pure Ne and Ne/O2mixtures at constant total gas pressure, it was found that the addition of O2to the sputtering gas quenches Ne i emission and increases emission from O i and O+2species to a greater extent than that which would be expected from the relative changes in neon and oxygen concentrations, respectively. Although this effect could be caused by a change in the electron density and electron energy distribution function, the correlation between Ne i, O i, and O+2emission suggests that metastable neon atoms may interact directly with ground state diatomic oxygen molecules in two competing ways: (1) by Penning ionization which produces O+2, and (2) by a quasiresonant transfer of excitation which leads to the production of O. The results are compared to those previously obtained for Ar/O2discharges using identical sputtering conditions, where the dominant interaction between the rare gas and O2leads entirely to the production of monatomic oxygen.
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