We have studied the structural change of targets and the ablated particles to classify the characteristics of laser ablation. Neutral atoms, positive ions and global particles are generated from metal targets irradiated by the KrF excimer laser beam. The average energy of 100∼180 eV per atom is required to ablate atomic particles. The targets after irradiation show the change of surface morphologies and X‐ray diffraction patterns due to heating. The change of chemical compositions and the resolidified layer are not observed. ©1996 American Institute of Physics.