Deposition of (100) oriented MgO thin films on sapphire by a spray pyrolysis method
作者:
W. J. DeSisto,
R. L. Henry,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 25
页码: 2522-2523
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103188
出版商: AIP
数据来源: AIP
摘要:
Thin films of magnesia have been deposited by a novel spray pyrolysis method. An aqueous magnesium acetylacetonate solution was ultrasonically nebulized, transported in flowing oxygen, and thermally decomposed on silicon (100), sapphire, and fused silica at temperatures between 400 and 550 °C. The films were from 0.1 to 0.5 &mgr;m thick, optically transparent, and smooth. The MgO films were poorly crystalline as deposited. MgO films on sapphire crystallized with strong (100) orientation after annealing at 700 and 930 °C in flowing oxygen.
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