Sealing of AlAs against wet oxidation and its use in the fabrication of vertical-cavity surface-emitting lasers
作者:
Dae Ho Lim,
Gye Mo Yang,
Jong-Hee Kim,
Kee Young Lim,
Hyung Jae Lee,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 14
页码: 1915-1917
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119979
出版商: AIP
数据来源: AIP
摘要:
We have studied the process of sealing an exposed AlAs to prevent further wet oxidation. A critical step in this sealing process consists of the first wet oxidation for a short time at 408 °C in a steam environment of a previously room-ambient exposed AlAs surface. During this brief wet oxidation, a dense oxide surface barrier with a thickness of 1.1 &mgr;m is formed, which further blocks diffusing oxygen species during the second wet oxidation. The effectiveness of the sealing is demonstrated through its use as a mask against wet oxidation in the fabrication of oxide-confined vertical-cavity surface-emitting lasers. ©1997 American Institute of Physics.
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