Temperature measurements of a birefringent substrate (LiNbO3) in a radio frequency discharge by laser interferometry
作者:
Tamiya Fujiwara,
Hiroshi Yamada,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 1
页码: 267-268
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144739
出版商: AIP
数据来源: AIP
摘要:
Temperatures of a birefringent substrate (LiNbO3) have been measured by laser interferometry in a 13.56 MHz rf discharge. The measurement method is based on monitoring the variation of natural birefringence with temperature. The transient temperature rises and equilibrium values are investigated in nitrogen plasma at rf powers of ∼86 W. Owing to the large heat capacity per unit area of the substrate, the time constant of temperature rises is about ten times as large as the previously reported value of a polymer substrate (PMMA).
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