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Implantation model for plasma ion irradiation of a sheath bounded surface

 

作者: C.A. Ordonez,   W.D. Booth,   R. Carrera,   M.E. Oakes,  

 

期刊: Radiation Effects and Defects in Solids  (Taylor Available online 1991)
卷期: Volume 116, issue 1-2  

页码: 49-57

 

ISSN:1042-0150

 

年代: 1991

 

DOI:10.1080/10420159108221344

 

出版商: Taylor & Francis Group

 

关键词: implantation;plasma;sheath;surface;interactions

 

数据来源: Taylor

 

摘要:

Ion implantation at plasma-facing surfaces is affected by the formation of the electrostatic sheath potential. The average energy of an ion can increase by more than a factor of three as a result of the sheath and the effect on ion implantation can be significant. In this paper, Monte Carlo calculations of plasma ion implantation are carried out including the effect of the sheath. The calculations incorporate a simulation of the velocity distribution of plasma ions incident on a surface with a floating potential. The effect of the surface floating potential is included in a new analytic model for plasma implantation. The new model should provide a fast and accurate means to calculate the distribution of plasma ion implantation.

 

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