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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena


ISSN: 1071-1023
1990s 1990 1991 1992 1993 1994 1995 1996 1997 1998 —
1980s — — — 1983 1984 1985 1986 1987 1988 1989