摘要:

The electron plays a role in many facets of modern life—lighting, heating, welding and so on. Here, I concentrate on the use of electrons primarily in logic and memory. I generally skip the early history—that of electronic tubes—and start instead with the modern integrated circuit and then go on to explore possible alternatives to the now‐dominant silicon MOSFET technology. (MOSFET stands for metal oxide semiconductor field‐effect transistor.) This approach is enforced not only by space considerations, but also by the fact that the passing years have erased triodes, power pentodes, klystrons, traveling‐wave tubes and the like from my memory. Not that they are no longer used; clones of the 6L6, EL34 and KT88 are still used in some of the best audio amplifiers. Microwaves and power applications still rely heavily on tubes. Cathode‐ray tubes are still the standard display, although their days may be numbered—at least at the large and small ends. Electron microscopes and lithography tools are, in a sense, large demountable vacuum tubes. (They are the subject of Murray Gibson's article on page 56 in this special issue.) However, over the past 40 years, the vacuum tube has been displaced by solid‐state devices as the basis of most computer, low‐power amplifier, communications and control circuits. (See figure 1, which shows a computer processing unit.)

ISSN:0031-9228    

DOI:10.1063/1.881963

出版商:AIP    

年代:1997

数据来源: AIP

摘要:

Cathode rays, accelerated by tens of thousands of volts or more, have had immense scientific and technological value in the hundred years since Joseph John Thomson used them to discover the electron. The most familiar use of these electron beams is in cathode‐ray tubes—as used in television sets and computer displays, for example. Electron microscopy, a less familiar use, has been a keystone method for visualizing the structure of materials on the atomic level, and continues to offer exciting developments. Electron beams have also found an important role in patterning semiconductor chips, and they may even supplant optical beams as a basis for lithography in the 21st century. Before the discovery of electrons, photons dominated microscopy. Now it seems that in both microscopy and lithography, electrons will take over. More power to rest mass! In this article, I give a glimpse of the state of the art in electron microscopy and lithography, and point out where I believe these fields are going.

ISSN:0031-9228    

DOI:10.1063/1.881964

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.881962

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.881973

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.881966

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.2806717

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.881968

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.881970

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.881971

出版商:AIP    

年代:1997

数据来源: AIP

ISSN:0031-9228    

DOI:10.1063/1.2806719

出版商:AIP    

年代:1997

数据来源: AIP