摘要:

AbstractThis paper discusses are modes at the anode, experimental results pertinent to anode phenomena, and theoretical explanations of anode phenomena.A vacuum are can exhibit five anode discharge modes: (1) a low current mode in which the anode is basically passive, acting only as a collector of particles emitted from the cathode; (2) a second low current mode that can occur if the electrode material is readily sputtered (a flux of sputtered atoms will be emitted by the anode); (3) a footpoint mode, characterized by the appearance of one or more small luminous spots on the anode (footpoints are generally much cooler than the true anode spots present in the last two modes); (4) an anode spot mode in which one large or several small anode spots are present (such spots are very luminous, have a temperature near the atmospheric boiling point of the anode material, and are a copious source of vapor and ions); and (5) an intense are mode where an anode spot is present, but accompanied by severe cathode erosion.The are voltage is relatively low and quiet in the two low current modes and the intense are mode. It is usually high and noisy in the footpoint mode, and it can be either in the anode spot mode. Anode erosion is low, indeed negative, in the two low current modes, and it is low to moderate in the footpoint mode. Severe anode erosion occurs in both the anode spot and intense are modes.The dominant mechanism controlling the formation of an anode spot appears to depend upon the electrode geometry, the electrode material, and the current waveform of the particular vacuum are being considered. In specific experimental conditions, either magnetic constriction in the gap plasma, or gross anode melting, or local anode evaporation can trigger the transition. However, the most probable explanation of anode spot formation is a combination theory, which considers magnetic constriction in the plasma together with the fluxes of material from the anode and cathode as well as the thermal, electrical, and geometric effects of the anode in analyzing the behavior of the anode and the nearby plasma.

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290302

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

摘要:

AbstractIn this paper the anode layer model including two zones is considered. It is suggested that in the collisionalless zone (the sheath) the potential drop is negative. For the collisional part of the anode layer the equation system is considered. This system takes into account the ionization non‐equilibrium in this layer. Here side by side with the electrical field the complementary diffusion mechanism of the current transfer is examined. This mechanism is stipulated by the existence of the electron gas pressure gradients in the anode layer. It is shown that the potential drop in the collisional part of the anode layer is also negative because of the action of the diffusion mechanism of the current transfer. In this way the full potential drop in the anode layer of the discharge burning in argon by atmospere pressure is turned out to be negative. The character of the change of the energy and impulse equations terms is discusse

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290303

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

摘要:

AbstractA summary is given on the temperature dependence and basic processes in dry etching. The basic processes as Physical and Chemical Sputtering and Surface Film Etching completed by ion or electron stimulation of gas‐surface reactions and combined with adsorption and desorption are used in modelling different types of etch characteristics. Of special interest are non‐monotoneous characteristics. For some typical examples a comparison between measured and calculated curves is given which permit the determination of some kinetic parameters as activation energies and residence ti

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290304

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

摘要:

AbstractApplying the Mayer's and Geppert‐Mayer's method and the method of direct summation the standard thermodynamic functions of some typical diatomic molecules present in SF6plasma were calculated. There are given STF data in the temperature region from 100 0 to 15 000K. Some problems of the determination of theSTFare discusse

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290305

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

摘要:

AbstractEffects of trapped ions on the nonlinear propagation of modified electron acoustic waves in an unmagnetized plasma consisting of one cold and one hot components of electrons and one single species of hot ions, have been investigated in this paper. It has been shown that while rarefactive soliton solution exists in such a plasma, no double layer solution has been found to exist. The potential, velocity and width of the soliton have been calculated.

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290306

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

摘要:

AbstractSpectral emissivity of hydrogen plasma with a nonideality parameter γ = 0.1 ÷ 0.15 has been measured in the wavelength region of 341 ÷ 513 mm using a 6A‐current stabilized d.c. arc at pressures up to 30 bars as the plasma generator. A comparison of the measured data and the data calculated using the Unsöld and Inglis‐Teller formulas shows no evident discrepancies that might be attributed to the additional influence of plasma microfields on the continuum emissivity of hydrogen at Balmer series limit for the range of electron concentrations and temperatures up to 1018cm−3and 14500 K, res

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290307

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

摘要:

AbstractDerivative‐free Abel inversions named here as ‘Indirect’ method is proved to be far superior to conventional ‘Direct’ method involving derivative term, by numerical experiments. With powerful least‐square fitting method named SALS developed at computer center of Tokyo University, and simple power‐series expansions of emission coefficiente(r)is sufficient without any iterations nor deconvolutions. 10‐test functions often used in literatures are treated and the result of numerical experiments show reconstructions reached to the ultimate of comp

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290308

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290309

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY

ISSN:0863-1042    

DOI:10.1002/ctpp.2150290301

出版商:WILEY‐VCH Verlag    

年代:1989

数据来源: WILEY