摘要:

AbstractThis paper presents a critical review of the basic data concerning the physics and chemistry of low pressure SiH4glow discharges used to deposit hydrogenated amorphous silicon films (a‐Si:H). Starting with an updated table of thermochemical data, we analyze the gas‐phase elementary processes consisting of i) electron‐molecule collisions, ii) ion‐molecule collisions, iii) neutral‐neutral collisions, iv) other electron and ion collisions involving electron‐ion and ion‐ion recombination, electron attachment on radicals and detachment of anions, and v) cluster growth kinetics in dusty plasmas. Experimental data or theoretical estimates are given and discussed in terms of cross‐sections, collision and reaction rate constants, and transport coefficients. We also analyze the surface processes and reaction probabilities of ions, radical

ISSN:0863-1042    

DOI:10.1002/ctpp.2150360102

出版商:WILEY‐VCH Verlag    

年代:1996

数据来源: WILEY

摘要:

AbstractThe spatial and surface chemical products and effectiveness of NOxremoval (abbreviated deNOx) under the corona discharge action at atmospheric pressure were investigated. The influence of high‐voltage electrode material on a discharge character and the heterogeneous influence of the electrode surface are also reported in the article. The qualitative analysis was performed using infrared absorption spectrometry. Special attention was paid to NO and NO2calibration measurement

ISSN:0863-1042    

DOI:10.1002/ctpp.2150360103

出版商:WILEY‐VCH Verlag    

年代:1996

数据来源: WILEY

摘要:

AbstractA study aimed at finding a way of scaling‐up a small laboratory reactor employing an electric discharge with a dielectric barrier was carried out. The dielectric used was ferroelectric ceramic material of a high permittivity (ϵ above 1000) comparing to glass (ϵ ≈︁ 3–10), which is generally used. The main component of the ceramics was BaTiO3. The advantage of using this type of ceramics is related to a considerable increase in power density without the need of increasing voltage which supplies the system.The influence of the thickness and surface of ferroelectric electrodes on the macroscopic characteristics of the discharge and efficiency of chemical process was investigated. Ozone synthesis from oxygen was the reaction under consideration.A new structure of the reactor was proposed comprising a series of parallelly spaced thin ceramic plates. High electric permittivity of the ferroelectric ceramics enables such „sandwich”︁ structure to be supplied by only two edge cer

ISSN:0863-1042    

DOI:10.1002/ctpp.2150360104

出版商:WILEY‐VCH Verlag    

年代:1996

数据来源: WILEY

摘要:

AbstractA formalism of the self‐consistent solution of the kinetic equation and the field equation is described for the positive plasma column in an inert gas discharge. The model considers the presence of electrons trapped in the potential well transfering the discharge current and of free electrons which reach the walls in a free diffusion regime supporting the required ionization level in the discharge. The calculations have been carried out for neon. In the model application range the comparison is made with experimental data of axial fields, wall potentials, wall currents and in some cases with distribution functions. A good correspondence takes plac

ISSN:0863-1042    

DOI:10.1002/ctpp.2150360105

出版商:WILEY‐VCH Verlag    

年代:1996

数据来源: WILEY

ISSN:0863-1042    

DOI:10.1002/ctpp.2150360101

出版商:WILEY‐VCH Verlag    

年代:1996

数据来源: WILEY