31. |
Duoplasmatron Ion Beam Source for Vacuum Sputtering of Thin Films |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1147-1151
K. L. Chopra,
M. R. Randlett,
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摘要:
A variation of the von Ardenne type of a duoplasmatron ion source is described. Here the arc discharge is maintained between the cathode in the high pressure and the anode in the vacuum chamber, as opposed to the conventional arrangement in which the arc discharge is confined primarily to the high pressure chamber. This modification allows the extraction, through apertures, of a well defined ion beam of current up to 500 mA over an area ∼1 cm2into a vacuum chamber at a pressure of ∼10−5Torr. The ion beam is accelerated and made to impinge on a target material for sputtering. Sequential sputtering of different targets inside the vacuum chamber is possible with the help of suitable magnetic fields. The ion beam has been used to sputter conducting, semiconducting, and insulating target materials. Typical rate of deposition of silver films at a distance of 8 cm from the target with a 50 mA, 2 kV ion beam of 8 mm diam is ∼400 Å/min. Deposition rates of ∼50 Å/min are obtained for SiO2and TiO films. Vacuum sputtered films adhere to the subtrates much more strongly than the evaporated films do. Gold and silver films grow epitaxially on rock salt substrates at ambient or lower temperatures. This vacuum sputtering process has been found to induce and stabilize new structures. For example, sputtered films of molybdenum, tantalum, tungsten (normally bcc), and hafnium, rhenium and zirconium (normally hcp) have been observed to exist in an fcc phase. Fcc structure films as thick as 2 &mgr; have been prepared. Epitaxial growth of the fcc structures on rock salt substrates at temperatures of ∼400°C are observed.
ISSN:0034-6748
DOI:10.1063/1.1721039
出版商:AIP
年代:1967
数据来源: AIP
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32. |
Small Particle Sizing Using Turbidimetric Layered Sedimentation |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1152-1156
Stuart A. Schleusener,
Alvin A. Read,
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摘要:
Application of turbidimetry to layered sedimentation for use in small particle sizing is investigated both theoretically and experimentally. The cavity of a 6328 Å He‐Ne gas laser is used to detect the low light losses experienced during layered sedimentation tests.
ISSN:0034-6748
DOI:10.1063/1.1721040
出版商:AIP
年代:1967
数据来源: AIP
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33. |
Photodiode Holder with 300 psec Rise Time for Laser Studies |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1157-1158
M. J. Lubin,
W. Leising,
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摘要:
A simple photodiode holder design is presented which exhibits less than 300 psec risetime response utilizing an ITT FW‐114A photodiode.
ISSN:0034-6748
DOI:10.1063/1.1721041
出版商:AIP
年代:1967
数据来源: AIP
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34. |
Valve for Precise Pipetting of Small Amounts of Gases |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1159-1160
Rudolf H. Bieri,
Minoru Koide,
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ISSN:0034-6748
DOI:10.1063/1.1721042
出版商:AIP
年代:1967
数据来源: AIP
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35. |
Pressure Gauge for Plasmas Subjected to Large Dynamic Electric and Magnetic Fields |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1160-1161
W. R. Grabowsky,
D. A. Durran,
M. E. Gerard,
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ISSN:0034-6748
DOI:10.1063/1.1721043
出版商:AIP
年代:1967
数据来源: AIP
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36. |
Ultrahigh Vacuum High Temperature Substrate Heater |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1161-1162
C. T. Naber,
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ISSN:0034-6748
DOI:10.1063/1.1721044
出版商:AIP
年代:1967
数据来源: AIP
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37. |
Immersed Double‐Jet Technique for Electrothinning Tungsten for Transmission Electron Microscopy |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1162-1164
Robert L. Ladd,
Robert C. Rau,
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ISSN:0034-6748
DOI:10.1063/1.1721045
出版商:AIP
年代:1967
数据来源: AIP
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38. |
Method of Light Chopping for Phosphoroscopes |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1164-1165
Bernard A. Baldwin,
Henry W. Offen,
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ISSN:0034-6748
DOI:10.1063/1.1721046
出版商:AIP
年代:1967
数据来源: AIP
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39. |
Spring Tensioned Metal‐to‐Ceramic Seal |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1165-1166
J. Klebanoff,
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ISSN:0034-6748
DOI:10.1063/1.1721047
出版商:AIP
年代:1967
数据来源: AIP
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40. |
Automatic Frequency Marker to Simplify Recorded Spectra Calibration |
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Review of Scientific Instruments,
Volume 38,
Issue 8,
1967,
Page 1166-1168
W. Hill,
R. Volpicelli,
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ISSN:0034-6748
DOI:10.1063/1.1721049
出版商:AIP
年代:1967
数据来源: AIP
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