摘要:

A vacuum feedthrough has been designed at this laboratory to operate at 40 kV and 10−9Torr. It is small in size, 3.81 cm in diameter and extending 4.45 cm into the vacuum chamber. A selection of commercial connectors is available. The re‐entrant design fully shields the conductor for safety, prevention of noise pickup, and protection from environmental effects.

ISSN:0034-6748    

DOI:10.1063/1.1134549

出版商:AIP    

年代:1976

数据来源: AIP

摘要:

A method of simultaneously controlling vacuum pressure and substrate bias using only a pressure controller is described for an rf bias sputtering system in which the bias is developed through substrate tuning.

ISSN:0034-6748    

DOI:10.1063/1.1134550

出版商:AIP    

年代:1976

数据来源: AIP

摘要:

A simple, rapid means of accurately aligning a slit parallel to the line focus of an x‐ray tube is described.

ISSN:0034-6748    

DOI:10.1063/1.1134551

出版商:AIP    

年代:1976

数据来源: AIP