摘要:

An inadvertent mistake was made in designating the gas inlets of the ion source shown in Fig. 1. In this figure, ‘‘Inlet for nonreactive discharge gas (Ar)’’ and ‘‘Inlet for working gas (O2)’’ should be exchanged with each other. The corrected version is shown here.

ISSN:0034-6748    

DOI:10.1063/1.1143797

出版商:AIP    

年代:1992

数据来源: AIP