摘要:

A straight‐through high vacuum gate valve with Conflat(R)type flanges, well within the manufacturing capabilities of small workshops is described. The valve is based on the translational displacement of only one part provided with a grove for a standard Viton O ring. Other sealings are performed with Viton and Teflon gaskets. The valve requires relatively small space in the pipeline direction, and is bakeable to 150 °C, open. ©1995 American Institute of Physics.

ISSN:0034-6748    

DOI:10.1063/1.1145621

出版商:AIP    

年代:1995

数据来源: AIP