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| 61. |
Simple device for monitoring secondary electron emission of materials in the pulse mode |
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Review of Scientific Instruments,
Volume 69,
Issue 4,
1998,
Page 1916-1917
Isay L. Krainsky,
Gary G. Lesny,
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摘要:
A simple device for simultaneously measuring the secondary electron emission coefficient &sgr; and the primary current in the pulse mode has been built. It allows convenient monitoring of these parameters for either conductive or insulating materials.
ISSN:0034-6748
DOI:10.1063/1.1149170
出版商:AIP
年代:1998
数据来源: AIP
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| 62. |
Ion energy and mass analyzer at radio frequency electrode in a plasma chamber |
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Review of Scientific Instruments,
Volume 69,
Issue 4,
1998,
Page 1918-1919
Naoki Mizutani,
Yasushi Nagata,
Akira Kubo,
Toshio Hayashi,
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PDF (51KB)
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摘要:
There are two modes for ion energy analysis at a rf electrode in a plasma chamber. One is a dc mode in which the electric potential of the ion energy analyzer is constant in time, and another is a rf mode in which the electric potential of the analyzer oscillates with same frequency, amplitude, and phase as that of the rf electrode. For correct ion energy analysis at the rf electrode, the rf mode is necessary. For ion mass analysis in the rf mode, the electric potential of the ion mass analyzer also must oscillate. We fabricated such an ion energy and mass analyzer, and confirmed its performance. ©1998 American Institute of Physics.
ISSN:0034-6748
DOI:10.1063/1.1148865
出版商:AIP
年代:1998
数据来源: AIP
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