|
|
| 31. |
Integrated ferroelectric microelectromechanical systems (MEMS) |
| |
Integrated Ferroelectrics,
Volume 7,
Issue 1-4,
1995,
Page 359-370
D.L. Polla,
P.J. Schiller,
Preview
|
PDF (1221KB)
|
|
摘要:
A ferroelectric test chip has been fabricated consisting of 1) piezoelectric (PZT) microsensors (accelerometers), 2) low-voltage, 3-μm,n-well CMOS signal conditioning electronics, 3) high-voltage (HVMOS) drive electronics, and 4) PZT microactuator diaphragms and cantilevers. This test chip has been developed to address processing problems encountered in the fabrication of integrated ferroelectric microelectromechanical systems (FMEMS). A description fabrication, IC-compatible process integration, electrical performance of diagnostic MEMS circuits and devices is presented.
ISSN:1058-4587
DOI:10.1080/10584589508220246
出版商:Taylor & Francis Group
年代:1995
数据来源: Taylor
|
| 32. |
Guest editorial |
| |
Integrated Ferroelectrics,
Volume 7,
Issue 1-4,
1995,
Page -
D.K. Fork,
Preview
|
PDF (82KB)
|
|
ISSN:1058-4587
DOI:10.1080/10584589508220215
出版商:Taylor & Francis Group
年代:1995
数据来源: Taylor
|
|
首页
