摘要:

The use of a sputter-cleaned copper/silver/gold (Cu/Ag/Au) alloy for calibrating the energy scale and instrument resolution (as full width at half-maximum or FWHM) of x-ray photoelectron spectrometers (XPS) was evaluated. The three component alloy material is a convenient alternative to the common practice of using three separate sputter-cleaned reference materials (i.e., Cu, Ag, and Au foils) for the calibration of XPS. The Cu 3p3/2, Cu 2p3/2, CuL3M4,5M4,5, Ag 3d5/2, AgM4NN, and Au 4f7/2peaks have been recommended in the literature for calibrating XPS spectrometers. Results indicate that the Cu/Ag/Au alloy yields XPS binding energies for these peaks within reasonable experimental error (i.e., ± 0.1–0.2 eV or less) of the values obtained for pure Cu, Ag, and Au materials. In addition, the FWHM values obtained for these peaks with the Cu/Ag/Au alloy were essentially equivalent (within 0–0.03 eV) with the values obtained for pure Cu, Ag, and Au foils.

ISSN:1055-5269    

DOI:10.1116/1.1247744

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

The Auger electron spectra for sputter-etched silicon carbide are presented. The first derivative CKLLAuger electron spectrum of a crystalline carbide exhibits a peak shape different from that of adventitious hydrocarbon. The peak shape of the CKLLspectrum for a carbide such as TaC contains three components present at the approximate kinetic energies of 250, 260, and 270 eV, with the peak at 270 eV having a greater intensity in the positive direction than the CKLLspectrum for adventitious hydrocarbon. The shape of the differentiated CKLLAuger peak for sputtered SiC exhibits its own unique shape and is characteristically different from adventitious hydrocarbon, graphite, and the other metal carbides.

ISSN:1055-5269    

DOI:10.1116/1.1247745

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

The Auger electron spectra for titanium carbide are presented. The first derivative Auger electron spectrum for the CKLLline is characteristic of a carbide. The differentiated CKLLpeak contains three components present at the approximate kinetic energies of 250, 260, and 270 eV, with the peak at 270 eV having a greater intensity in the positive direction than adventitious hydrocarbon. The unique shape of the differentiated CKLLAuger peak can be used to identify this carbide compound.

ISSN:1055-5269    

DOI:10.1116/1.1247746

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

The Auger electron spectra for amorphous boron carbide (B4C) are presented. The first derivative CKLLAuger electron spectrum of a crystalline carbide exhibits a peak shape different from that of adventitious hydrocarbon. The peak shape of the CKLLspectrum for a carbide such as TaC contains three components present at the approximate kinetic energies of 250, 260, and 270 eV, with the peak at 270 eV having a greater intensity in the positive direction than the CKLLspectrum for adventitious hydrocarbon. The features exhibited in the differentiated CKLLAuger spectrum for amorphous B4C are similar, but not identical to other metal carbides and are characteristically different from adventitious hydrocarbon, graphite, SiC, and other metal carbides.

ISSN:1055-5269    

DOI:10.1116/1.1247760

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

Gold spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer using unmonochromatized MgKαx rays and two pass energy settings corresponding to anaylzer energy resolutions of 1.34 and 0.54 eV. The specimen was a high purity gold foil that was sputter-cleaned by 3 keV Ar ions. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.34 eV. Multiplexes of the Au 4f(80–100 eV), Au 4d(325–365 eV), Au 4p3/2(535–565 eV), and valence band region (−5–20 eV) were measured at an analyzer energy resolution of 0.54 eV.

ISSN:1055-5269    

DOI:10.1116/1.1247747

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

Copper spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer (XPS) using unmonochromatized MgKαx rays and four pass energy settings corresponding to analyzer energy resolutions of 1.34, 0.54, 0.27, and 0.13 eV. The specimen was a high purity copper foil that was sputter-cleaned by 3 keV Ar ions. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.34 eV. Multiplexes of the Cu 2p(924–974 eV), Cu 3p(65–90 eV), Cu 3s(113–138 eV), valence band region (−5–10 eV), and CuLVVAuger lines (305–355 eV) were measured at analyzer energy resolutions of 0.54, 0.27, and 0.13 eV.

ISSN:1055-5269    

DOI:10.1116/1.1247748

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

Nickel by MgKαXPSNickel spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer (XPS) using unmonochromatized MgKαx rays and four pass energy settings corresponding to analyzer energy resolutions of 1.34, 0.54, 0.27, and 0.13 eV. The specimen is a high purity (99.95%) 4μm thick nickel foil that was obtained from the Goodfellow Corporation and was sputter-cleaned by 3 keV Ar ions for 5 min. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.35 eV. Multiplexes of the Ni 2p(845–895 eV), Ni 3p(55–88 eV), Ni 3s(100–130 eV), Ni 2s(995–1025 eV), valence band region (−5–20 eV), and NiLVVAuger lines (378–428 eV) were measured at analyzer energy resolutions of 0.54, 0.27, and 0.13 eV.

ISSN:1055-5269    

DOI:10.1116/1.1247749

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

Nickel spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer (XPS) using monochromatic AlKαat five pass energy settings corresponding to analyzer resolutions of 1.34, 0.54, 0.27, 0.13, and 0.067 eV. The specimen is a high purity 4μm thick nickel foil (99.95%) obtained from the Goodfellow Corporation and was sputter-cleaned by 3 keV Ar ions for 5 min. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.34 eV. Multiplexes of the Ni 2p(845–895 eV), Ni 3p(58–88 eV), Ni 3s(100–130 eV), Ni 2s(995–1025 eV), valence band region (−5–20 eV), and NiLVVAuger lines (611–661 eV) were measured at analyzer energy resolutions of 0.54, 0.27, and 0.13 eV. Those of the Ni 2p(847–885 eV), Ni 3p(59–84 eV), valence band region (−3–15 eV), and NiLVVAuger lines (612–655 eV) were also measured at analyzer energy resolution of 0.067 eV.

ISSN:1055-5269    

DOI:10.1116/1.1247750

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

We report x-ray photoemission spectra (XPS) of nickelous oxide (NiO). XPS spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer using unmonochromatized MgKαx rays at two pass energy settings corresponding to analyzer energy resolutions of 1.34 and 0.54 eV. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.34 eV. Multiplexes of the C, O, and Ni photoemission lines, valence band region, as well as the NiLVVAuger line were measured at an analyzer energy resolution of 0.54 eV. The research grade high purity NiO sample was obtained commercially from Atomergic Chemetals Corporation.

ISSN:1055-5269    

DOI:10.1116/1.1247751

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

We report x-ray photoemission spectra (XPS) of beta-nickel hydroxide (β-Ni(OH)2). XPS spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer using unmonochromated MgKαx rays at two pass energy settings corresponding to analyzer energy resolutions of 1.34 and 0.54 eV. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.34 eV. Multiplexes of the C, O, and Ni photoemission lines, valence band region as well as the NiLVVAuger lines were measured at an analyzer energy resolution of 0.54 eV. The research grade high purityβ-Ni(OH)2sample was obtained commercially from Chemical Company, Inc.

ISSN:1055-5269    

DOI:10.1116/1.1247752

出版商:American Vacuum Society    

年代:1994

数据来源: AIP