摘要:

Using a Monte Carlo simulation method we have investigated the channeled motion of recoils in a composite amorphous-crystalline target. The study has been applied to a SiO2/Si system and to the motion of oxygen recoils in the crystalline Si substrate.

ISSN:0033-7579    

DOI:10.1080/01422448408205222

出版商:Taylor & Francis Group    

年代:1984

数据来源: Taylor

摘要:

The annealing mechanism of divacancies involved in radiation defect clusters is suggested in accordance with which the interaction of interstitial carbon atoms and intrinsic diinterstitials, mobile at T≳ 100°C, with divacancies results in their smooth annealing in a wide temperature range.

ISSN:0033-7579    

DOI:10.1080/01422448408205223

出版商:Taylor & Francis Group    

年代:1984

数据来源: Taylor

摘要:

Structure and impurity behaviour of silicon doped by B+ion implantation up to dose of 2 × 1015ion/cm2have been investigated after lamp pulse annealing. It has been demonstrated that the implanted layer structure strongly depends on the implantation dose, light energy density, as well as the crystallographic orientation. The optimal annealing result in the structure, which is equivalent to that obtained in the thermal treatment, The impurity diffusive redistribution proved to be rather weaker then in the case of thermal treatment.

ISSN:0033-7579    

DOI:10.1080/01422448408205224

出版商:Taylor & Francis Group    

年代:1984

数据来源: Taylor

摘要:

The structure and electrophysical properties of a silicon layers after P+and Sb+ion implantation and subsequent pulse annealing of millisecond lengths have been investigated by the transmission electron microscopy and four-point probe measurements. It has been demonstrated, that for certain implantation and annealing conditions the epitaxially grown layers can involve the microtwins and dislocation loops. The impurity redistribution under the pulse annealing depends on the implantation dose and rather weaker the light irradiation energy density.

ISSN:0033-7579    

DOI:10.1080/01422448408205225

出版商:Taylor & Francis Group    

年代:1984

数据来源: Taylor

ISSN:0033-7579    

DOI:10.1080/01422448408205226

出版商:Taylor & Francis Group    

年代:1984

数据来源: Taylor