21. |
Simultaneous exposure and development technique for making gratings on positive photoresist |
|
Applied Physics Letters,
Volume 24,
Issue 4,
1974,
Page 196-199
Won‐Tien Tsang,
Shyh Wang,
Preview
|
PDF (361KB)
|
|
摘要:
A simultaneous exposure and development technique for forming diffraction gratings and recording holograms in positive photoresist is described. This technique not only reduces the exposure time significantly, but is also able to produce gratings with deep grooves and sharp ridges. With the photoresist placed in a liquid‐filled prismlike container, the smallest period obtainable by this method is reduced by a factor equal to the index of refraction of the liquid.
ISSN:0003-6951
DOI:10.1063/1.1655151
出版商:AIP
年代:1974
数据来源: AIP
|
22. |
Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon |
|
Applied Physics Letters,
Volume 24,
Issue 4,
1974,
Page 200-202
N. J. Chou,
Y. J. van der Meulen,
R. Hammer,
J. Cahill,
Preview
|
PDF (235KB)
|
|
摘要:
Phosphorus redistribution during thermal oxidation of degenerately doped silicon was investigated using Auger electron spectroscopy and ellipsometry. Concentration profiles were determined with a combination of chemical and sputter etching techniques. A substantial phosphorus pileup was observed in the oxide in a thin layer near the ellipsometrically determined Si&sngbnd;SiO2interface. Calibrated against standards of known concentration, this layer was found to contain ∼2×1021phosphorus atoms/cm3, independent of the oxidation temperature between 850 and 1000 °C.
ISSN:0003-6951
DOI:10.1063/1.1655152
出版商:AIP
年代:1974
数据来源: AIP
|
23. |
cw HF chemical laser from the reaction of F atoms with C3H8and C4H10 |
|
Applied Physics Letters,
Volume 24,
Issue 4,
1974,
Page 202-204
J. F. Hon,
J. R. Novak,
Preview
|
PDF (245KB)
|
|
摘要:
cw laser emission has been obtained from vibrationally excited HF produced by the reaction of F with C3H8and C4H10. F atoms are obtained by combusting F2and D2, diluted with He, with F2in excess. The combustor products are mixed with C3H8or C4H10using parallel flow (pressure matched) produced by supersonic nozzles for both the F, F2, DF, and He combustor product mixture and C3H8and C4H10.
ISSN:0003-6951
DOI:10.1063/1.1655153
出版商:AIP
年代:1974
数据来源: AIP
|
24. |
Measurement of CO2‐laser‐generated impulse and pressure |
|
Applied Physics Letters,
Volume 24,
Issue 4,
1974,
Page 204-207
J. E. Lowder,
L. C. Pettingill,
Preview
|
PDF (331KB)
|
|
摘要:
Measurements of impulse transferred to large metallic targets in air produced with a variable‐pulse‐length high‐power 10.6‐&mgr;m laser beam are presented. Peak focal spot pressure measurements in Plexiglas are also presented which show that the peak pressure increases approximately as the 3/2 power of the peak power density and that at a fixed power density higher peak pressures are obtained by increasing the focal spot size.
ISSN:0003-6951
DOI:10.1063/1.1655154
出版商:AIP
年代:1974
数据来源: AIP
|
25. |
Holographic coupler for integrated optics |
|
Applied Physics Letters,
Volume 24,
Issue 4,
1974,
Page 207-208
E. A. Ash,
E. Seaford,
O. Soares,
K. S. Pennington,
Preview
|
PDF (161KB)
|
|
摘要:
Coupling optical energy into an integrated optical circuit is essentially a problem of mode conversion from a Gaussian laser beam to the specific mode of waveguide excitation desired. This paper describes preliminary experimental results obtained with couplers in which mode conversion is performed by holographic wave‐shaping techniques.
ISSN:0003-6951
DOI:10.1063/1.1655155
出版商:AIP
年代:1974
数据来源: AIP
|