摘要:

The application of a micro-Fourier transform infrared, (&mgr;-FTIR), spectroscopic system, using synchrotron radiation as a light source, for photoresist chemical analysis has been investigated. The better signal to noise due to the high brightness of the infrared radiation from the synchrotron permits higher spatial resolution scans than with a conventional glowbar. This permits a new technique of &mgr;-FTIR spectroscopy, which potentially can get close to diffraction limited resolution, with high chemical sensitivity, for mid-IR wavelengths ranging from 2.3 &mgr;m(4400 cm−1)to 9 &mgr;m(1100 cm−1).An example of application of imaging the local chemistry changes of a chemically amplified photoresist with post-exposure bake shows the exciting capability of this technique for nondestructive resist exposure process control. ©1997 American Institute of Physics.

ISSN:0003-6951    

DOI:10.1063/1.119665

出版商:AIP    

年代:1997

数据来源: AIP

摘要:

A model of the electrical conductance of a resistive or semiconductive substrate, as a function of the average thicknessdof a deposited film in initial growth on the substrate is proposed. The total conductance has two terms: one proportional tod2/3for three-dimension (3D) growth, and one proportional todfor 2D growth or for increasing number of islands. The model was applied to the conductance of a Sn film deposited on aSiOxsubstrate showing that the initial growth is dominated by 3D growth. The proposed model may be useful forin situstudy of the growth of ultra thin films prior to the onset of tunneling conductance. ©1997 American Institute of Physics.

ISSN:0003-6951    

DOI:10.1063/1.119666

出版商:AIP    

年代:1997

数据来源: AIP

摘要:

Laser irradiation of absorbing materials can be used to generate acoustic pulses with extremely high amplitude and short pulse duration. Such acoustic pulses can transfer energy and momentum to atomic particles on solid surfaces to cause desorption of the particles. We report experimental observations of the effect of laser-induced acoustic desorption (LIAD) of electrons from metal film surfaces and hydrogen ions from the surface of palladium saturated with hydrogen. We believe LIAD can be used as a gentle technique to transfer analyte molecules and ions into gas phase for mass analysis and for other applications. ©1997 American Institute of Physics.

ISSN:0003-6951    

DOI:10.1063/1.119667

出版商:AIP    

年代:1997

数据来源: AIP