摘要:

In this research, 2‐dimensional PZT cantilever array with integrated heaters and piezoelectric sensors, called, ‘thermo‐piezoelectric’ cantilever has been fabricated, and studied for thermo‐mechanical writing and piezoelectric readback on a polymer film for high speed and low power SPM (Scanning Probe Microscopy) based nano‐data‐storage system. Power consumption could be considerably low in read/write process due to new piezoelectric readback method and the selection of low Tgpolymer media. The sensitivity of 0.22 fC/nm is obtained. The silicon cantilever with piezoelectric sensor was used to obtain charge readback signal using the pattern SiO2with 100‐nm depth. To improve the data rates, we have developed and fabricated a (100×100) 2‐D thermo‐piezoelectric cantilever array for parallel operation and we introduce a simple equivalent model of PZT sensor for estimating data rate of thermo‐piezoelectric cantilever and circuit analysis is accomplished using this model. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639701

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

The key elements of a scanning near field microscope (SNOM) are high throughput and good spatial resolution. While both are desirable they are difficult to combine in a probe that is reproducible and durable. A batch‐fabrication method is being developed for AFM based SNOM with lithographically defined structured apertures. Due to the lithographic control of aperture size and shape the probes can be optimised for the imaging of sub‐wavelength structures, for spectroscopic analysis, fluorescence or polarisation measurements. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639702

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

A new approach to preparation of single‐crystalline silicon AFM tip probes is proposed. The approach is based on growing silicon whiskers by the vapor‐liquid‐solid (VLS) process and, then, transformation of the whiskers into sharp tips. The whiskers are grown on the standard‐shaped cantilevers whose broadest surface has the crystallographic orientation (111). The cross‐section of the grown whiskers is changed in a controlled manner so that the tips take an optimal shape and sizes. The new approach allows to prepare some new versions of the probes and their combinations with other microscopic techniques (SEM, optical microscopes, etc). © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639703

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

We fabricated a robust and high aspect ratio tungsten deposited tip (TD tip) using a Focused Ion Beam (FIB). This tip was well controlled during fabrication. Tip diameter is uniform at around 90nm and its growing length is proportional to the irradiation time of the ion beam. Tip shape is a cylindrical pillar and aspect ratio (length/diameter) is greater than 10. Growing angle of the tip is identical to the incident angle of the ion beam. Critical dimension (CD) measurement of shallow trench isolation (STI) was performed using this tip. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639704

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

We present here new cantilevers for scanning probe microscopy (SPM) and sensor applications, which consist of silicon cantilever beam and ceramic pedestal. Silicon is only used to make cantilever beams and tips. Precision‐machinery‐made ceramics replaces silicon pedestal part. The ceramics was recently developed by Sumikin Ceramics and Quarts Co., Ltd. and can be machined precisely with end mill cutting. Many silicon beams are fabricated at once from a wafer using batch fabrication method. Therefore, SPM probes can be fabricated in high productivity and in low cost. These beams are transferred with transfer technique and are bonded on the ceramic pedestal with epoxy glue. We demonstrate here atomic force microscope (AFM) and gas sensor applications of the hybrid structure. In a gas sensor application, the ends of the cantilever are selectively modified with zeolite crystals as a sensitive layer. The bonding strength is enough for each application. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639705

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

The numerous, proprietary file formats for Scanning Probe Microscopy (SPM) have caused problems in the field of both off‐line quantitative, data analysis and comparison, as well as long‐term archiving of measurement results. Because of the eminent roll SPM’s are playing in the multidisciplinary scientific world of today, an open, XML‐based, standard SPM data format, called Scanning Probe Microscopy Markup Language (SPML) is proposed. XML (eXtensible Markup Language) has proven to be well applicable for standardized, structured, scientific data formats in many other disciplines. The structure of SPML will be explained briefly. The versatility of SPML as well as the possibilities of documenting, publishing, searching and exchanging SPM‐data will be shown in examples. This paper gives an overview of the proposed data format, while the complete description can be found athttp://spml.net. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639706

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

A scheme for the fabrication of combined Scanning Electrochemical Microscopy — Atomic Force Microscopy (SECM‐AFM) probes is presented for both silicon nitride and silicon cantilevers. The advantages over exsisting methods used for their production is explained. The process flow is described and initial results from electrodeposition of silver are presented. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639707

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

A small cantilever probe for high speed AFM imaging in water has been developed. It is a rectangular cantilever, so‐called beak‐like cantilever, made of silicon‐nitride with dimensions of about 10 &mgr;m × 2 &mgr;m × 0.13 &mgr;m. By applying oxide‐sharpening technique for silicon nitride probe apexes, the triangular apexes that were shaped by photo‐lithography, were further sharpened and terminated into one point. An average radius of curvature of 18.4 nm was achieved. This novel sharpening technique is useful for the fabrication of small cantilevers when low cost is required. The typical resonant frequency of the small cantilevers was 1.4 MHz in air and the estimated spring constant was 0.2 N/m. Immersing the cantilevers in water, the resonant frequency dropped by a factor of three to five. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639708

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

We have developed a process of making a highly conductive carbon nanotube (CNT) probe. The process is as follows. 1) An amorphous carbon layer was deposited on the protruding part of a CNT probe as a mask. 2) A metal layer was deposited on all over the CNT probe. 3) The amorphous carbon layer was removed so that the metal layer was remained only at the contact area of the CNT and a base tip. The resultant CNT probes have been applied to contact mode atomic force microscopy (AFM) for measuring topographic images and current images to prove their ability. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639709

出版商:AIP    

年代:1903

数据来源: AIP

摘要:

Electrochemical etching in an aqueous solution (NaOH, HCl), using a teflon tubing to physically restrict the active etching region, has been developed to fabricate Scanning Tunneling Microscopy (STM) tips from a range of magnetic materials. Tips have been produced from polycrystalline MnNi, Cr, Fe and Ni with small radius of curvature, high aspect ratio and apexes in the 50–100 nm range. Atomic resolution STM images have been achieved on the Fe3O4(001) and (111) surface using MnNi tips, which are interpreted in terms of a possible spin‐polarized effect. © 2003 American Institute of Physics

ISSN:0094-243X    

DOI:10.1063/1.1639710

出版商:AIP    

年代:1903

数据来源: AIP