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61. |
Reflection high‐energy electron diffraction observations during growth of ZnSxSe1−x(0≤x≤1) by molecular‐beam epitaxy |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 769-772
H. J. Cornelissen,
D. A. Cammack,
R. J. Dalby,
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摘要:
Different surface reconstructions were observed during growth of ZnSxSe1−x(0≤x≤1) and the growth conditions under which these occur were determined. Zn‐rich ZnSe growth shows ac(2×2) surface reconstruction, while under Se‐rich growth a (2×1) surface is observed. On ZnSxSe1−x(x≤0.16) and on ZnSe/ZnSxSe1−xsuperlattice structures a (5×) reconstruction is observed. Se desorption experiments suggest that Se is bound as a dimer to a Se stabilized ZnSxSe1−xsurface. The intensity of the specular beam increases after switching from molecular‐beam epitaxy growth of ZnSe to atomic layer epitaxy growth. Implications on the ZnSe growth mechanism are discussed.
ISSN:0734-211X
DOI:10.1116/1.584370
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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62. |
Summary Abstract: Valence band discontinuities at the heterojunctions between CdTe, ZnTe, and HgTe in the (100) orientation: X‐ray photoelectron spectroscopy study |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 773-774
C. Hsu,
J. P. Faurie,
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ISSN:0734-211X
DOI:10.1116/1.584371
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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63. |
Summary Abstract: Thermodynamic analysis of the molecular‐beam epitaxy of Al1−xInxAs on InP and GaAs (001) substrates |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 775-776
F. Turco,
J. Massies,
J. C. Guillaume,
J. P. Contour,
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PDF (150KB)
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ISSN:0734-211X
DOI:10.1116/1.584372
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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64. |
Light‐enhanced molecular‐beam epitaxial growth in II–VI and III–V compound semiconductors |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 779-781
H. H. Farrell,
R. E. Nahory,
J. P. Harbison,
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摘要:
In this paper we suggest mechanisms by which light interacts with surface species during growth using molecular‐beam epitaxy (MBE) and related techniques. Such mechanisms are discussed, not only for impurity incorporation, but also for the growth of undoped compound semiconductors. This work provides a conceptual framework for understanding these light‐induced processes that, in and of themselves, represent a major breakthrough in the MBE fabrication of such materials. It opens up the possibility of makingp–njunctions in II–VI materials and the subsequent potential for their use in applications requiring new kinds of electronic, photonic, and photolithographic devices.
ISSN:0734-211X
DOI:10.1116/1.584374
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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65. |
Summary Abstract: Properties of substitutionally doped CdMnTe films and CdMnTe–CdTe quantum well structures |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 782-783
R. L. Harper,
S. Hwang,
N. C. Giles,
R. N. Bicknell,
J. F. Schetzina,
E. K. Suh,
D. U. Bartholomew,
Y. R. Lee,
A. K. Ramdas,
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PDF (117KB)
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ISSN:0734-211X
DOI:10.1116/1.584330
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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66. |
Structural characterization of GaAs/ZnSe interfaces |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 784-787
M. C. Tamargo,
J. L. de Miguel,
D. M. Hwang,
H. H. Farrell,
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摘要:
We have studied, using reflection high energy electron diffraction (RHEED), the initial growth stages of ZnSe layers grown by molecular beam epitaxy (MBE) on GaAs exhibiting various surface terminations. The structural quality of the ZnSe layers was assessed by transmission electron microscopy (TEM). We have observed a preference for two‐dimensional nucleation on As‐terminated GaAs substrates, whether epitaxial or bulk. On Ga‐terminated surfaces a transitional region of three‐dimensional growth forms initially. The different behaviors may reflect the electronic imbalance present in the growing GaAs/ZnSe interface. While defect free, thin layers of ZnSe are best obtained on As‐terminated GaAs, the initial three‐dimensional growth region on the Ga‐rich surfaces appears to reduce the density of extended faults formed in thick ZnSe layers due to the lattice mismatch with GaAs.
ISSN:0734-211X
DOI:10.1116/1.584331
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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67. |
New achievements in Hg1−xCdxTe grown by molecular‐beam epitaxy |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 788-793
S. Sivananthan,
M. D. Lange,
G. Monfroy,
J. P. Faurie,
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摘要:
A review of our recent achievements in the growth of Hg1−xCdxTe by molecular‐beam epitaxy is presented here. The influences of the substrate temperature, the crystallographic orientation, and the nature of the substrate on the properties of Hg1−xCdxTe are discussed in detail. We show that to grow high‐quality material with good uniformity in terms of the alloy composition and the doping by crystal stoichiometry deviation, the substrate temperature should be between 180 °C andTmax. We report mobilities as high as 5.0×1205cm2 V−1 s−1forn‐type layers and 1.2×103cm2 V−1 s−1forp‐type layers, achieved by precisely controlling the growth parameters. We illustrate that the Hg condensation coefficient is influenced by the crystallographic orientation. Our results show that for Hg1−xCdxTe grown on both the (111)Band the (100) faces of CdTe or GaAs the Hall mobilities are very high and comparable. We report our important achievement of the successful growth of 2‐in.‐diam Hg1−xCdxTe films on GaAs(100), with Δx/x̄ as low as 0.7% forx̄=0.218 (Δxis the standard deviation andx̄ is the mean value), Δt/t̄ as low as 0.6% for the layer thickness, excellent uniformity in the doping, an high electron or hole mobility. This illustrates the excellent control that our group has achieved toward the growth of this material by molecular‐beam epitaxy.
ISSN:0734-211X
DOI:10.1116/1.584332
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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68. |
Reflection high‐energy electron diffraction oscillations during growth of metallic overlayers on ideal and nonideal metallic substrates |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 6,
Issue 2,
1988,
Page 794-798
S. T. Purcell,
A. S. Arrott,
B. Heinrich,
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摘要:
Oscillations in the intensity of reflection high‐energy electron diffraction (RHEED) patterns are observed for Fe, Ni, Au, and Mn overlayers epitaxially grown in various combinations on Fe, Ni, Au, Ag, and Ru substrates. Fe whickers are nearly ideal substrates for the study of RHEED and RHEED oscillations during growth. Oscillations for metals and semiconductors show similar dependence on temperature, diffraction angles, and surface impurities.
ISSN:0734-211X
DOI:10.1116/1.584333
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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