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1. |
Modulation of atomic interdiffusion at the Si(111)–Au interface |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 524-529
A. Franciosi,
D. G. O’Neill,
J. H. Weaver,
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摘要:
We attained a wide modulation of the Si(111)–Au interface reaction by deposition of controlled amounts of Cr on the semiconductor surface beforeinsitujunction formation. Synchrotron radiation photoemission studies show that Cr deposition gives rise to a Si/Cr reacted interlayer that dramatically affects the subsequent Si–Au interdiffusion. Negligible interdiffusion of Cr and Au atoms was found in all cases so that the Si–Au intermixing depends upon an exchange reaction at the Si/Cr–Au interface in which Si is the only moving species. Large reduction of the interdiffusion occurs sharply above a critical value of Cr deposition (10 monolayers) that corresponds to a fully reacted Si(111)–Cr interface.
ISSN:0734-211X
DOI:10.1116/1.582590
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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2. |
Chemical reaction at the annealed Si/Yb interface |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 530-532
G. Rossi,
J. Nogami,
J. J. Yeh,
I. Lindau,
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摘要:
We present the first evidence of formation of mixed valent compounds at the Si(111)/Yb interface upon annealing. Two stable and uniform compositions were found, these being related to the known bulk silicides YbSi and YbSi2. The mixed valence behavior is seen in the presence of the strong 4f13(Yb3+) signal and in the shift of the 4f14(Yb2+) signal to the Fermi level.
ISSN:0734-211X
DOI:10.1116/1.582593
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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3. |
Study of the GaAs–Au and Si–SiO2interface formation by the Kelvin method |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 540-545
L. Lassabatère,
J. M. Palau,
E. Vieujot‐Testemale,
A. Ismail,
C. Raisin,
J. Bonnet,
L. Soonckindt,
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摘要:
In this paper we describe typical and simple results concerning the deposition of metal on GaAs surfaces and the first steps of Si oxidation. In the case of GaAs/metal, typical results illustrating the barrier formation, the electron affinity modification, the contribution of initial surface defects, and metal induced defects are presented and discussed, using the unified model of Spicer, Lindauetal. In the case of Si/SiO2, we focus on illustrating the method of the growth of the oxide and the resulting work function modifications.
ISSN:0734-211X
DOI:10.1116/1.582595
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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4. |
Formation and properties of the copper silicon(111) interface |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 546-552
F. Ringeisen,
J. Derrien,
E. Daugy,
J. M. Layet,
P. Mathiez,
F. Salvan,
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摘要:
The initial stages of the Cu growth on top of a 7×7 Si(111) surface were monitored with LEED, AES, UPS, and XPS techniques. Results suggest that at room temperature the Cu growth proceeds by a laminar fashion. An intermixing between Si and Cu takes place giving rise to a diffuse interface extending to several first monolayers. This fact is testified by the splitting of the SiLVVtransition in AES spectra, by the deviation of the AES and XPS Cu and Si signal plot versus coverage from a perfect layer by layer growth plot, and by a strong diffuse background intensity in LEED diagram. Moreover, at this coverage range, a slight narrowing and a shift (0.7 eV±0.2 eV) of the 3dCu peak towards higher binding energy as compared with the bulk metal are observed in valence band photoemission spectra. With increasing coverage, a metal rich phase is found displaying an ordered 1×1 Cu(111) planelike structure. No Si enrichment at the topmost metallic layer is observed by XPS. Core level spectroscopy gives similar results showing a noticeable energy shift (0.6 eV±0.2 eV) for the Cu 2pline. A depth profile confirms the interface structure which is rather metastable at room temperature. At high temperature (T>400 °C), an ordered Cu induced pattern is found at θ∼1 monolayer. The diagram resembles a 5×5 superstructure. With increasing coverage, 3D crystallites are growing on top of the first ordered layer. The interface is stable at high temperature.
ISSN:0734-211X
DOI:10.1116/1.582596
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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5. |
Epitaxial growth of Ag films on Ge(001) |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 553-557
Jeffrey R. Lince,
Jeffrey G. Nelson,
R. Stanley Williams,
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摘要:
The deposition of thin films of Ag on clean Ge(001) substrates has been investigated using low energy electron diffraction, Auger electron spectroscopy, and scanning electron microscopy. Ag was deposited from an effusion source onto Ge at both 325 and 600 K substrate temperatures. Deposition on high temperature substrates resulted in the formation of Ag islands with no apparent crystalline order, whereas films deposited at temperatures near 325 K onto clean Ge(001) 2×1 surfaces were oriented. The deposition of the equivalent of one Ag(001) monolayer on the Ge surfaces resulted in a Ge(001) 1×1‐like LEED pattern. As deposition was continued (up to 500 monolayers), a pattern evolved which is consistent with two (011) 1×1 Ag domains oriented at 90° to one another. This behavior is interpreted in terms of a predominantly Stranski–Krastanov growth mechanism for the initial deposition of Ag onto near room temperature Ge(001) substrates. Annealing of a sample with a thin, ordered film revealed the original Ge(001) 2×1 LEED pattern, which demonstrated that the chemical interaction between Ge and Ag is very weak.
ISSN:0734-211X
DOI:10.1116/1.582597
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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6. |
Electronic structure of metal–semiconductor interfaces |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 558-563
Inder P. Batra,
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摘要:
In a recent paper, we investigated the electronic properties of a set of Ge–Al lattice‐matched interfaces. These interfaces were constructed by placing an ideal (001)Ge substrate next to a 45° rotated (001)Al film. In all cases the Ge–Al interatomic distance was kept fixed at someadhocvalue. Using a self‐consistent pseudopotential approach, we now extend these calculations to consider the case where the interlayer distance is fixed for the on top and interstitial model but the Ge–Al interatomic distance is allowed to vary. One striking result of our calculation is that the differences among diverse interface geometries lead only to small differences in electronic properties if the interlayer distance is kept fixed. Single atomic metal overlayer calculations by Chelikowsky, and Zhang and Schluter in different configurations show more pronounced differences. Our results indicate that inclusion of more than one metal layer tends to smear out these differences. We also calculate an optimal geometrical arrangement by minimizing the total energy of the system. We critically discuss the weakly interacting cluster model and the chemisorption model of metal–semiconductor interfaces and place our work in context. We also present a semiclassical calculation which relates the interface density of occupied states to surface quantized level spacing. It suggests a possible surface absorption experiment for determining this state density. Future ramifications of our idealized model and the role it can play in simulating interfacial chemical reactions are briefly stated.
ISSN:0734-211X
DOI:10.1116/1.582598
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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7. |
Interface formation at PbTe(100) surfaces: Ge, Al, and In overlayers |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 570-573
F. Cerrina,
R. R. Daniels,
Te‐Xiu Zhao,
V. Fano,
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摘要:
Adsorption processes were investigated for the first time on a IV–VI substrate, PbTe, by photoemission spectroscopy with synchrotron radiation Ge, Al, and In overlayers on cleaved PbTe(100) all create an inversion layer at the PbTe side of the interface. Substantial Pb and Te outdiffusion is observed even at room temperature, resulting in nonabrupt interfaces. The band discontinuities of the PbTe–Ge interface are much different from those theoretically predicted by the electron affinity rule.
ISSN:0734-211X
DOI:10.1116/1.582600
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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8. |
The dependence of Al Schottky barrier height on surface conditions of GaAs and AlAs grown by molecular beam epitaxy |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 574-580
W. I. Wang,
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摘要:
A systematic study of the Al Schottky barrier height on clean GaAs(100) and AlAs(100) as a function of initial arsenic surface coverage has been performed. Two new surface phases on AlAs(100) have been observed. Al Schottky barrier height showed a steady decrease with increasing arsenic coverage on GaAs, and showed steady increase with increasing arsenic coverage on AlAs. The results are compared with current models of Schottky barrier formation.
ISSN:0734-211X
DOI:10.1116/1.582601
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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9. |
Schottky barrier formation of Ag on GaAs(110) |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 581-587
R. Ludeke,
T.‐C. Chiang,
T. Miller,
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摘要:
Photoemission studies of Ag deposits on cleavedn‐ andp‐type GaAs for coverages from ∼0.003 to 20 monolayers indicate clustered Ag growth and undetectable chemical interactions with the substrate. The position of the surface Fermi level changed throughout the deposit range. The data is inconsistent with most of the existing Schottky barrier models. The results are interpreted in terms of donor‐ and acceptorlike interface states which are characteristic of the clusters but modified by the screening at the interface. Values for the Schottky barrier of 0.89 eV onn‐type and 0.35 eV onp‐type material were obtained for the thickest coverage.
ISSN:0734-211X
DOI:10.1116/1.582602
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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10. |
Schottky barrier formation and intermixing of noble metals on GaAs(110) |
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Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena,
Volume 1,
Issue 3,
1983,
Page 593-597
S. H. Pan,
D. Mo,
W. G. Petro,
I. Lindau,
W. E. Spicer,
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摘要:
Photoemission measurements are used to study the Schottky barrier formation and the intermixing (with GaAs) of the three metals, Cu, Ag, and Au, deposited at room temperature on GaAs(110) cleaved surfaces. It is tentatively concluded that Fermi level pinning cannot be followed satisfactorily for metal coverages above a monolayer. The work of Palau on Schottky barrier height (I–VandC–V) for Au and Ag deposited on cleaved GaAs(110) in UHV indicate pinning positions surprisingly close to those found for other overlayers in the ‘‘unified defect’’ model. It was found that ‘‘intermixing’’ between noble metals and GaAs decreases in the order of Cu, Au, and Ag. Although island formation probably occurs, it is tentatively concluded that the principle reason for difficulty in using our photoemission measurements to determineEfsfor the noble metals is the inclusion of Ga (as well as As) in or on the noble metal overlayer.
ISSN:0734-211X
DOI:10.1116/1.582604
出版商:American Vacuum Society
年代:1983
数据来源: AIP
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