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101. |
Growth of &bgr;‐SiC film by pyrolysis of polyimide Langmuir–Blodgett films on silicon |
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Journal of Applied Physics,
Volume 77,
Issue 12,
1995,
Page 6733-6735
Beifang Yang,
Weili Cai,
Pingsheng He,
Yongning Sheng,
Bangkun Jin,
Yaozhong Ruan,
Keliang Hu,
Yunlan Huang,
Guien Zhou,
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摘要:
The heteroepitaxial growth of &bgr;‐SiC has been studied by pyrolysis of polyimide Langmuir–Blodgett films on silicon substrate in the temperature range 500–1000 °C in vacuum. Thin SiC films have been grown at temperatures above 700 °C. Both the onset temperature of the SiC formation and the growth rate of the SiC films were affected by the orientation of the silicon substrates. The growth rate of the SiC films increased with temperature and was controlled by the reaction of Si with C‐containing reactants. By comparison with dip‐coating polyimide films, it was found that the crystallinity of the SiC layers depended on the degree of order of the molecular arrangement in the polyimide films. Highly ordered superlattice structures of polyimide LB films favored the growth of single crystal SiC films.
ISSN:0021-8979
DOI:10.1063/1.359092
出版商:AIP
年代:1995
数据来源: AIP
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102. |
Erratum: ‘‘Ensemble Monte Carlo study of electron transport in degenerate bulk GaAs’’ [J. Appl. Phys.70, 6854 (1991)] |
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Journal of Applied Physics,
Volume 77,
Issue 12,
1995,
Page 6736-6736
Nabil S. Mansour,
Karim Diff,
Kevin F. Brennan,
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ISSN:0021-8979
DOI:10.1063/1.359617
出版商:AIP
年代:1995
数据来源: AIP
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103. |
Erratum: ‘‘Monte Carlo based calculations of hole transport including the hole‐plasmon interaction in degenerate bulk GaAs’’ [J. Appl. Phys.75, 4009 (1994)] |
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Journal of Applied Physics,
Volume 77,
Issue 12,
1995,
Page 6737-6737
Nabil S. Mansour,
Yang Wang,
Kevin F. Brennan,
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ISSN:0021-8979
DOI:10.1063/1.359619
出版商:AIP
年代:1995
数据来源: AIP
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104. |
Erratum: ‘‘Particle sputtering and deposition mechanism for material transfer in breaking arcs’’ [J. Appl. Phys.76, 3326 (1994)] |
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Journal of Applied Physics,
Volume 77,
Issue 12,
1995,
Page 6738-6738
Zhuan‐Ke Chen,
Koichiro Sawa,
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摘要:
ISSN:0021-8979
DOI:10.1063/1.359618
出版商:AIP
年代:1995
数据来源: AIP
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