ISSN:0022-5355    

DOI:10.1116/1.1318500

出版商:American Vacuum Society    

年代:1973

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1318505

出版商:American Vacuum Society    

年代:1973

数据来源: AIP

摘要:

A quantitative analysis of a large and representative sample of available data has been made to determine the best criteria for predicting the relative sensitivities of ionization-type vacuum gauges to different gases. The molecular property of the gas that correlates best with relative sensitivity is the ionization cross section σ (eV). The best σ value to choose according to gauge type is as follows: 1. For high-pressure ionization gauges, a σ evaluated at23of the accelerating potential of the gauge is the best choice. 2. For Bayard-Alpert and triode gauges, any of three choices are of approximately equal value. These are 100 eV σ values, maximum σ value for each gas, and a σ evaluated at23of the accelerating potential for each gauge. 3. For the Alphatron gauge, σ values in the range 5000–10 000 eV provide the best correlation. 4. For cold cathode ionization gauges, insufficient data were available to come to any conclusions.

ISSN:0022-5355    

DOI:10.1116/1.1318508

出版商:American Vacuum Society    

年代:1973

数据来源: AIP

摘要:

A method is given whereby one may graphically determine the radiation heat transfer properties of a number of closely packed radiation shields. The method uses the gray body formula, taking into account variations in total thermal emissivity of the adjacent shields as a function of temperature. Results were used in the construction of a high temperature vacuum furnace. Excellent correlation was found between graphically predicted and calorimetrically measured results.

ISSN:0022-5355    

DOI:10.1116/1.1318509

出版商:American Vacuum Society    

年代:1973

数据来源: AIP

摘要:

Glow discharge optical spectroscopy was used as a technique for monitoring the rate of sputtering and the rate of film deposition. It was determined that within the pressure and voltage range of these experiments the product of the electroluminescent emission intensity of a given sputtered target species in the discharge and the time of sputtering is linearly proportional to both the change in mass of the target and the final thickness of the deposited film. In the case of compound targets, the emission intensity from either constituent can be monitored. The emission signal was shown to be generated primarily in a narrow region directly in front of the target.

ISSN:0022-5355    

DOI:10.1116/1.1318510

出版商:American Vacuum Society    

年代:1973

数据来源: AIP

摘要:

A numerical method for extracting gas mixture compositions from pulsed vacuum network data is discussed. The problem of imposing boundary conditions is considered. Results of the analysis of several artificial gas mixtures are presented.

ISSN:0022-5355    

DOI:10.1116/1.1318511

出版商:American Vacuum Society    

年代:1973

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1318512

出版商:American Vacuum Society    

年代:1973

数据来源: AIP