摘要:

A charged particle flux is generated by electron-beam evaporation sources. These charged particles interact on the surface of thin films, affecting their properties, and can cause spurious readings on measuring instruments such as thin-film resistance monitors. The flux and average particle energy from a 180 ° bent beam gun has been measured using a1 cm2probe. These measurements were made at 40 cm from the source and at source power to 6 kW with aluminum, copper, and silver. The net flux, consisting of low energy particles, was found to have an electron density on the same order as that of the metal flux being deposited for silver and copper. A positive ion flux of about 0.1% of that for the other metals was observed for aluminum. The influence of deposition rate and source power on flux arid average particle energy are discussed.

ISSN:0022-5355    

DOI:10.1116/1.1315820

出版商:American Vacuum Society    

年代:1970

数据来源: AIP