摘要:

In the investigation of the structural properties of thin films by x-ray diffraction the lack of material, interference from the substrate, and generally, high orientations of the grains makes analysis of the films very difficult. In order to fully characterize a thin film for stresses (macro- and micro-), grain size, orientation, faulting probability, and solid solution effects, it is necessary to employ a range of x-ray techniques with some special experimental conditions. It is shown that a full strnctural analysis of thin films (alloy films included) can be routinely carried out making comparison of different types of thin film possible. Two 12-kÅ-thick Al films are characterized and it is shown that large errors can occur in residual stress and solid solution effect if the data is not handled properly.

ISSN:0022-5355    

DOI:10.1116/1.1315368

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

摘要:

The residual gas conditions in numerous commercial oil diffusion pumped coaters have been examined by mass spectroscopy during an extensive program. Particular regard is devoted to organic contamination. The main topics covered are: hydrocarbon partial pressures and their determining parameters in systems equipped with water-cooled and deep-cooled baffles; the influence of oil backstreaming; suitable measures to reduce contamination; a discussion of various contamination sources, for example, the foreline system. The pump fluid was found not to be the most important contaminant in many cases, particularly in coaters working under normal production instead of laboratory conditions. Whereas a slight contamination by pump fluid vapor cannot be avoided completely unless by deep-cooled baffles, all other contaminations are avoidable in principle without such devices. Some operational suggestions are given.

ISSN:0022-5355    

DOI:10.1116/1.1315369

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

摘要:

The critical energy for trapping was defined and was then calculated for five gases (N2, Ar, CO,CO2, andN2O). The gas and the solid on which it is trapped were of the same chemical species. The calculations were made using measured values of the capture coefficient which came from cryopumping data [J. P. Dawson and J. D. Haygood, Cryogenics5, 57 (1965)]. The calculated values were obtained from an interpretation of experimental results; they were not derived from calculation of the energy and momentum exchange between a gas particle and a perfect lattice. Capture coefficients were available for a range of both surface and gas temperatures. Two cases were treated; in the first the capture coefficient was independent of surface temperature while the second case considered the surface temperature dependent values of the capture coefficients. For the first case, it was found thatEc/Dwas of the order of 1, whereEcis the critical energy for trapping andDis the depth of the surface potential well. For the second case, the relationshipEc=Aexp(B/Tsurface)fitted the data for all five gases.

ISSN:0022-5355    

DOI:10.1116/1.1315370

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

摘要:

Electrical and superconducting properties of rhenium and molybdenum films prepared by electron beam evaporation have been measured as a function of substrate temperature, film thickness, and substrate material. The films were prepared at residual pressures of5×10−8Torr. In addition, films of each material were prepared by reactive deposition at nitrogen pressures in the10−5Torr range. Rhenium films prepared at low residual pressures exhibited superconductivity with onset temperatures from 2.5–4.9 K depending on thickness and substrate temperature. However, rhenium films prepared by reactive deposition in nitrogen had onset temperatures from 4.6–5.5 K. Transition temperatures from 3.3–3.8 K were observed in molybdenum films at thicknesses greater than 6000 Å when deposited at substrate temperatures of 600 °C. Crystal structure and preferred orientation were determined by x-ray diffraction methods.

ISSN:0022-5355    

DOI:10.1116/1.1315371

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1315372

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1315373

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1315374

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1315375

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1315376

出版商:American Vacuum Society    

年代:1970

数据来源: AIP

ISSN:0022-5355    

DOI:10.1116/1.1315377

出版商:American Vacuum Society    

年代:1970

数据来源: AIP