摘要:

AbstractLaser deposition of gold lines from spin‐on metallorganic (MO) precursors has been studied. A readily available and relatively low‐cost commercial MO ink has been used to write gold interconnects on different substrates. The physical properties of the ink, its laser‐firing process on oxidised silicon substrates and its electrical characterisation are presented here, together with the experimental procedure needed for obtaining low‐resistivity d

ISSN:1057-9257    

DOI:10.1002/amo.860020112

出版商:John Wiley&Sons Ltd.    

年代:1993

数据来源: WILEY

摘要:

AbstractCeramic thin films of yttria‐stabilised zirconia (YSZ), SrTiO3(STO) and CeO2have been deposited on Si(100) substrates by laser ablation. The films have been characterized by X‐ray diffractometry, field emission scanning electron microscopy and secondary ion mass spectrometry (SIMS). The effects of the oxygen partial pressure during deposition and the substrate temperature were studied. All the films have preferential orientation: (h00) and (hh0) for STO and (hhh) for CeO2and YSZ. The films show a low density of particulates and a very smooth surface. SIMS profiles indicate a low interdiffusion between film and silicon. One of the applications of these materials is their use as a buffer layer for the growth of YBCO on silicon. Because both materials are highly reactive, it is necessary to put a barrier between YBCO and silicon. For this purpose we used the ceramic films previously deposited in order to obtain superconducting YBCO films. The deposited YBCO films present good superconducting properties with zero resistance at temperatures between 80 and 8

ISSN:1057-9257    

DOI:10.1002/amo.860020113

出版商:John Wiley&Sons Ltd.    

年代:1993

数据来源: WILEY

ISSN:1057-9257    

DOI:10.1002/amo.860020101

出版商:John Wiley&Sons Ltd.    

年代:1993

数据来源: WILEY