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11. |
A method of determining hydrogen in aluminum by removing surface gases with ion beam etching |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3111-3114
Y. Kato,
T. Kitamura,
E. Isoyama,
M. Hasegawa,
T. Momose,
H. Ishimaru,
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摘要:
A method of determining gases after ion beam etching on aluminum surface has been tried to improve the present lower limit of determining hydrogen in aluminum. The present lower limit of determining internal hydrogen is 0.05 cm3/100 g Al STP. To improve the present lower limit, it is necessary to remove surface gases on aluminum. Carbon compounds and oxide film on aluminum were removed by neon ion beam etching on the dose of 2.8×1017ions/cm2or more. On the etched surface, no carbon and oxygen were observed using Auger electron spectroscopy. Determined hydrogen was 0.0055 cm3/100 g Al, about one‐tenth of the lower limit by the traditional method.
ISSN:0734-2101
DOI:10.1116/1.575483
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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12. |
Chemical shifts of silicon and titanium in titanium silicide studied by Auger electron spectroscopy, slow electron energy‐loss spectroscopy, and internal x‐ray photoelectron spectroscopy |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3120-3124
J. K. N. Sharma,
B. R. Chakraborty,
S. M. Shivaprasad,
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摘要:
This paper describes the study of Auger and core‐level energy shifts measured for pure Si, Ti, and TiSi2by Auger electron spectroscopy (AES), slow electron energy‐loss spectroscopy (SEELS), and internal x‐ray photoelectron spectroscopy (IXPS). The Auger line‐shape changes in TiSi2are noted and the chemical shifts measured. The deep‐core‐level loss energies of the siliconK‐ andL‐shell electron and the titaniumL‐ andM‐shell electrons are determined using SEELS technique. The collective surface and bulk plasma excitations in Ti, Si, and TiSi2are also observed. Using a high‐energy beam Si(Kα) x rays are generated to produce titanium photoelectrons by the IXPSL‐shell electrons in TiSi2. The core level shifts observed from AES, SEELS, and IXPS are compared and this confirms the already established metallic nature of the silicide.
ISSN:0734-2101
DOI:10.1116/1.575485
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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13. |
Distribution of intermediate oxidation states at the silicon/silicon dioxide interface obtained by low‐energy ion implantation |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3125-3129
O. Benkherourou,
J. P. Deville,
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摘要:
This work has been undertaken to understand the morphology of Si/SiO2interfaces obtained by low‐energy ion implantation. The crystallinity of the interface is determined by the observation of tetrahedral configurations [Si–(Si4−x–Ox) withx=0, 1,...,4] of silicon atoms bound to oxygen and/or silicon. The distribution over the whole interface also has been considered and the amorphous dioxide has been characterized by its interfacial depth and compared with the theoretical models such as the random bonding model or the random mixture model.
ISSN:0734-2101
DOI:10.1116/1.575486
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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14. |
Quantitative determination of atomic concentrations by Auger electron spectroscopy |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3130-3133
Y. Goldstein,
A. Many,
O. Millo,
S. Z. Weisz,
O. Resto,
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摘要:
A simple mathematical analysis presented here shows that unless the ratio of the instrumental resolution width to the natural linewidth of each Auger line is less than about 0.3, the measured peak‐to‐peak amplitudes of the differentiated Auger signals do not represent accurately the atomic concentrations. At the same time, the analysis provides the means for overcoming this difficulty even when the linewidth ratio is considerably larger than 0.3. A universal relation is presented whereby the experimentally measured peak‐to‐peak amplitudes can be corrected so as to enable one to derive quite accurately the relative atomic concentrations in one’s samples; so much so, provided reliable Auger sensitivities of the elements are available. Unfortunately, however, most of the sensitivity data, especially for the high‐energy Auger lines, were measured with insufficient resolution. In fact, we show that at least in some cases the published data were measured with a resolution far from satisfactory. It is our contention, therefore, that there is a need for a revision of the sensitivity data with the required resolution if they are to be used for quantification.
ISSN:0734-2101
DOI:10.1116/1.575487
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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15. |
Pthalimide on copper: A model system to address certain site‐specific interactions at the polyimide–copper interface |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3134-3139
W. R. Salaneck,
S. Stafström,
J.‐L. Brédas,
S. Andersson,
P. Bodö,
S. P. Kowalczyk,
J. J. Ritsko,
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PDF (466KB)
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摘要:
As a model molecule for a specific part of a polyimide, pthalimide has been studied adsorbed upon copper substrates at low temperatures using angle‐dependent x‐ray photoelectron spectroscopy. A stable adsorbate is found to exist in the approximate range −30 °C≤T≤−5 °C. The pthalimide molecule lies approximately flat upon the polycrystalline copper surface. Charge transfer from the copper to the adsorbate is observed. The present results are in contrast with those obtained when copper is vapor deposited upon a polyimide, as reported in the literature.
ISSN:0734-2101
DOI:10.1116/1.575488
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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16. |
Photodesorption from stainless steels |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3140-3143
A. Mesarwi,
A. Ignatiev,
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PDF (291KB)
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摘要:
The photodesorption by low‐energy photons (hν≤6 eV) from three types of stainless steels is examined. For all these systems both CO and CO2were observed to photodesorb with high yields: ≊10−3molecules/photon for CO2and ≊10−4molecules/photon for CO at λ=250 nm. The observed threshold energies were found to be the same for all systems atE0=2.92 eV for CO2andE0=2.92–3.10 eV for CO.
ISSN:0734-2101
DOI:10.1116/1.575489
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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17. |
Fabrication of a cryogenic foam target for inertial confinement fusion experiments |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3144-3147
T. Norimatsu,
H. Katayama,
T. Mano,
M. Takagi,
R. Kodama,
K. A. Tanaka,
Y. Kato,
T. Yamanaka,
S. Nakai,
Y. Nishino,
M. Nakai,
C. Yamanaka,
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摘要:
The first successful fabrication of a cryogenic foam target is reported. Detailed techniques to ensure accurate fuel loading in the foam shell are described. This target has been used for implosion experiments with the Gekko XII glass laser.
ISSN:0734-2101
DOI:10.1116/1.575490
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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18. |
Use of successive expansion technique to determine volume ratios of ≊5000 for vacuum gauge calibration |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3148-3153
J. K. N. Sharma,
Pardeep Mohan,
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PDF (347KB)
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摘要:
The method of successive expansion first used by Elliott and Clapham [National Physical Laboratory (U.K.) Report No. MOM28, 1978] for measuring volume ratios of ∼100 has been shown to be feasible for measuring volume ratios of ∼2830 with uncertainties of ±0.15 % while using a capacitance manometer with a lower pressure range for measuring the final pressures. The volume ratios thus determined have enabled the authors to reduce the systematic errors associated with the pressures generated by the series expansion system in their laboratory. Further, an attempt has been made to quantify the error in the measurement of volumes of chambers consisting of one or more metal diaphragm valves. In order to completely eliminate errors on this account an alternative calibration procedure has been outlined. The possibility of extending the measurement to ratios of ≊5000 has also been discussed.
ISSN:0734-2101
DOI:10.1116/1.575051
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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19. |
Densification‐induced infrared and Raman spectra variations of amorphous SiO2 |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3154-3156
R. A. B. Devine,
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ISSN:0734-2101
DOI:10.1116/1.575047
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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20. |
Magnetic field designs for cylindrical‐post magnetron discharge sources |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3156-3158
G. Y. Yeom,
John A. Thornton,
Alan S. Penfold,
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PDF (245KB)
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ISSN:0734-2101
DOI:10.1116/1.575048
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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