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| 21. |
Post cathode magnetron sputter deposition inside a long, small‐diameter closed‐end tube |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3159-3160
C. R. Peeples,
R. E. Cuthrell,
D. M. Mattox,
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PDF (123KB)
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摘要:
We have demonstrated the possibility of depositing thick molybdenum films closed−end insulating tube using the post cathode magnetron sputter deposi tion configuration using a high sputtering gas pressure an a means for rem oving the surface charge buildup. (AIP)
ISSN:0734-2101
DOI:10.1116/1.575049
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 22. |
Morphology and microstructure of magnetron sputtering ion‐plating Al films as a function of deposition time |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3160-3163
L. J. Wan,
B. Q. Chen,
K. H. Kuo,
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PDF (389KB)
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ISSN:0734-2101
DOI:10.1116/1.575052
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 23. |
A modified diode method for measuring work function change |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3163-3164
G. Haase,
Z. Rozenzweig,
M. Asscher,
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PDF (144KB)
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ISSN:0734-2101
DOI:10.1116/1.575050
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 24. |
Thermocouple mounting on semiconductor samples |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3164-3166
D. S. Blair,
G. L. Fowler,
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PDF (226KB)
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摘要:
We have designed an alternate method of attaching a thermocouple to a semiconductor which is both simple and reliable. It consists of a tungsten base alloy thermocouple threaded through a hole in the sample and held in place by a tantalum strap. (AIP)
ISSN:0734-2101
DOI:10.1116/1.575053
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 25. |
Surface temperature determination in surface analytic systems by infrared optical pyrometry |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3166-3168
Donald R. Wheeler,
William R. Jones,
Stephen V. Pepper,
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PDF (217KB)
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ISSN:0734-2101
DOI:10.1116/1.575054
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 26. |
An easily constructed, inexpensive cold stage for use in ultrahigh vacuum |
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Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films,
Volume 6,
Issue 6,
1988,
Page 3168-3169
G. Nelson,
T. Ohlhausen,
E. Hardegree,
P. Schulze,
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PDF (128KB)
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摘要:
A liquid‐nitrogen‐cooled sample holder for use in ultrahigh vacuum systems is described. The holder is well suited for either resistive or electron‐beam heating, and requires less coolant than some other designs. The holder can be constructed from commercially available parts for about $350, using commonly available tools.
ISSN:0734-2101
DOI:10.1116/1.575055
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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